Damping device

Abstract

The invention discloses a damping device which comprises a first flange, a second flange and a corrugated tube. The upper surface of the second flange is hermetically connected with a vacuum cavity; the lower surface of the first flange is hermetically connected with a vacuum pump; and the corrugated tube is provided with a first opening end and a second opening end. The first opening end of the corrugated tube is hermetically connected with the upper surface of the first flange; and the second opening end of the corrugated tube is hermetically connected with the lower surface of the second flange. The first flange and the second flange both have circular ring structures which are provided with uniformly bulges protruding outwards and the bulges are provided with mounting holes. The damping device also comprises a gas spring and a nut, wherein two ends of the gas spring are respectively provided with a connecting part which correspondingly penetrates through the mounting holes of the first flange and the second flange and are meshed with the nut; the connecting part is provided with an external thread; and the nut is provided with an internal thread meshed with the external thread. The damping device has the advantages of compact structure, good damping effect, low cost and long service life.

Description

technical field [0001] The present invention relates to a shock absorbing device mechanical equipment, in particular to a shock absorbing device for shock absorbing a vacuum cavity Background technique [0002] In the automated and semi-automated production of the modern semiconductor industry, lithographic printing equipment, optical fields, and electronic equipment industries and other industrial production and experimental processes, high-stability anti-shock technology is required, and the harm caused by vibration is undoubtedly fatal. However, on the one hand, the floor under our feet is subject to various disturbances from the outside world all the time, such as earthquakes, nearby vehicles, heavy machinery in motion, walking staff and all other troubles It will bring large or small vibrations to the floor. It has no effect on substances with low anti-vibration requirements, but it is indeed destructive to substances with high anti-vibration requirements, such as in th...

AI Technical Summary

Problems solved by technology

Compared with the present invention, the shock absorption of the first kind is relatively passive; the second kind has poor portability and short service life compared with the present invention

The method of increasing inertia to reduce vibration has two disadvantages: 1. The shock absorption is relatively passive, because this method simplifies the suction pipeline, and the rigid connection between the pump body and the cavity is adopted, and the vibration can still be directly transmitted to the cavity. , the vibration cannot be reduced from the source; 2. The cost is high, because increasing the quality requires increasing the material, and also increasing the difficulty of processing

There are three disadvantages in the structure of using bellows connection to reduce vibration: 1. Short life, because the bellows are not protected by any device, they will be subject to some flexible force, and the compression ratio of the bellows before and after air extraction will be too large, thus Affect the life; 2. Poor portability, because the pump body is placed in isolation; 3; Affect the pumping speed of the gas in the cavity, because the bellows of this shock absorption method are generally long and the flow resistance of the gas is too large

[0004] Therefore, in order to overcome the characteristics of poor damping effect and short service life of conventional shock absorbing devices, there is an urgent need for a shock absorbing device with compact structure, good shock absorbing effect, low cost and long service life.

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