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Method for prolonging service life of vacuum pump of single crystal furnace

A technology of vacuum pump and single crystal furnace, applied in single crystal growth, chemical instruments and methods, crystal growth and other directions, can solve the problems such as the decrease of the pumping speed of the vacuum pump, and achieve the effect of improving the service life and saving the cost.

Inactive Publication Date: 2010-05-19
NAN AN SANJING SOLAR POWER
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Problems solved by technology

However, there is only a layer of fine metal mesh in the ordinary vacuum filter, which can only filter impurities with larger particles, and it is difficult to remove impurities with smaller particles in the airflow, such as dust. Therefore, it is still difficult to prevent fine impurities from entering the vacuum pump. in oil
[0004] Therefore, regular replacement of vacuum pump oil and installation of vacuum filters can improve the stability of vacuum pump pumping speed to a certain extent, but there are still many defects, especially for the decline of vacuum pump pumping speed during the growth of silicon single crystal.

Method used

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  • Method for prolonging service life of vacuum pump of single crystal furnace

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Embodiment Construction

[0014] refer to figure 1 , the oil filter of the present invention is installed between the vacuum pump and the furnace body, and includes a filter cavity 3, a filter cover 2 located at the top of the cavity, and an air intake pipe 1 located in the center of the filter for connecting The outlet pipe of the furnace chamber; an exhaust pipe 6 located on the side of the filter cavity is connected to the vacuum pump. The filter cavity 3 has a silicone oil layer 5 at the bottom, which is composed of vacuum pump oil and is used to adsorb fine impurities in the gas; there is a stainless steel filter screen 4 above the silicone oil layer 5, which is used to filter relatively small impurities. Coarse particle impurities, the outlet of the intake pipe 1 is located between the silicone oil layer 5 and the filter screen 4 . The arrows in the figure indicate the gas flow direction.

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Abstract

The invention relates to a method for prolonging the service life of a vacuum pump of a single crystal furnace. In the method, an oil filter is arranged on a vacuum pumping pipeline between the vacuum pump and a furnace chamber so as to filter various impurities carried by air flow from the furnace chamber. Before the air flow carrying various impurities leaves the furnace chamber and enters the vacuum furnace, the impurities are filtered through the oil filter to protect vacuum pump oil, so that the service life of the vacuum pump is correspondingly improved.

Description

technical field [0001] The invention relates to a method for prolonging the life of a vacuum pump, in particular to a method for prolonging the life of a vacuum pump used in a single crystal furnace. Background technique [0002] The Czochralski method is the main method for producing silicon single crystals. During the crystal pulling process, impurities and silicon oxides volatilized due to the high temperature in the furnace will be absorbed into the vacuum pump oil and mixed with the pump oil. As the working time increases, the viscosity of the vacuum pump oil will continue to increase, resulting in a decrease in the efficiency of vacuum pumping. To a certain extent, the vacuum pump must periodically change the pump oil. Although the pump oil is changed frequently, the efficiency of the vacuum pump will decrease significantly with the increase of the usage rate, which is mainly caused by excessive impurities during the vacuuming process. In addition, due to the increa...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/00
Inventor 南毅马殿军张伟娜郑智雄林霞胡满根
Owner NAN AN SANJING SOLAR POWER
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