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MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof

A technology for micro-electromechanical components and manufacturing methods, which is applied in the manufacturing of electrical components, electrical solid-state devices, semiconductor/solid-state devices, etc., and can solve problems such as affecting the operation of mechanical structures.

Inactive Publication Date: 2012-07-04
PIXART IMAGING INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the mechanical structure of the MEMS component is usually located above the overall component, if dust particles fall into the component, it will affect the operation of the mechanical structure

Method used

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  • MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof
  • MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof
  • MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof

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Embodiment Construction

[0024] The drawings in the present invention are all schematic, mainly intended to represent the manufacturing process steps and the upper and lower sequence relationship between each layer, as for the shape, thickness and width, they are not drawn to scale.

[0025] First, a first embodiment of the present invention will be described. see Figure 1A In this embodiment, firstly, a zeroth layer wafer substrate 11 is provided, and the substrate 11 can be, for example, a silicon substrate to be compatible with the CMOS process. Next, on the substrate 11, transistor elements (not shown) are produced by a CMOS process, and then interconnects are produced by deposition, lithography, etching and other processes in sequence, such as Figure 1A The contact layer 12a, each metal layer 13, each channel layer 12b, etc. Wherein, the contact layer and the channel layer can be made of tungsten, the metal layer can be made of aluminum, and the dielectric material can be made of oxide such a...

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Abstract

The invention relates to a micro mechanical electro element with the function of dust prevention and a manufacturing method thereof. The micro mechanical electro element with the function of dust prevention comprises a substrate which comprises a micro mechanical electro element area including a micro mechanical electro structure part separated from the other part area; a dustproof layer deposited on the substrate for protecting tiny dust particles; and a shielding layer arranged above the dustproof layer, in which the micro mechanical electro structure part is not separated from the other part area before the dustproof layer is deposited.

Description

technical field [0001] The invention relates to a microelectromechanical element and a manufacturing method thereof, in particular to a microelectromechanical element with a dustproof function and a manufacturing method thereof. Background technique [0002] There are various applications of MEMS components such as micro-acoustic pressure sensors, gyroscopes, accelerometers, etc. Since the mechanical structure of the MEMS component is usually located above the overall component, if dust particles fall into the component, the operation of the mechanical structure will be affected. Therefore, it is necessary for such MEMS components to protect the fine dust particles from falling into the components. Contents of the invention [0003] The purpose of the present invention is to overcome the deficiencies and defects of the prior art, and propose a micro-electromechanical element with dust-proof function. [0004] Another object of the present invention is to provide a method...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/30B81B7/00B81C1/00
Inventor 王传蔚李昇达
Owner PIXART IMAGING INC