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Five-freedom lens adjusting device

A technology for adjusting devices and degrees of freedom, applied in installation, optics, instruments, etc., can solve problems such as inability to adjust the verticality of the chip, affecting the precise grasping of the chip, damage, etc.

Inactive Publication Date: 2010-06-23
DG HUST MFG ENG RES INST +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the three-dimensional adjustment mechanism can only adjust the relative position of the scanning lens and the chip, but cannot adjust the perpendicularity of the scanning lens to the chip.
Often, there is a deviation between the position of the chip scanned by the scanning system and the moving position of the wafer on the supply platform, which seriously affects the precise grasping of the wafer by the swing arm transfer system, resulting in missed detection or damage to the chip

Method used

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Embodiment Construction

[0022] The present invention will be further described with reference to the following examples.

[0023] A five-degree-of-freedom lens adjustment device, such as figure 1 , figure 2 As shown, it includes a three-dimensional adjustment mechanism 1 that can be adjusted along three directions of X, Y, and Z, a lens clamping base 2, and a rotating device 3. The lens clamping base 2 includes a female clamping base 21 and a male clamping base 22 , and the female clamping base 21 and the male clamping base 22 cooperate to fix the lens 5 therein. The rotating device 3 is connected with the lens clamping base 2 , and the three-dimensional adjustment mechanism 1 is fixedly connected with the rotating device 3 . The three-dimensional adjustment mechanism 1 is provided with an X-direction adjustment knob 11, a Y-direction adjustment knob 12 and a Z-direction adjustment knob 13. By adjusting the three-dimensional adjustment mechanism 1, the rotating device 3 can be adjusted along the t...

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Abstract

The invention relates to a five-freedom lens adjusting device, which comprises a three-dimensional adjusting mechanism, a lens clamping seat and a rotation device, wherein the rotation device comprises a first rotation device and a second rotation device, the first rotation device comprises a first rotation support plate, a first rotation shaft, a first upper adjusting screw and a first lower adjustment screw, the second rotation device comprises a second rotation support plate, a second rotation adjusting plate, a second rotation shaft, a second upper adjusting screw and a second lower adjusting screw, the plane on which the second rotation support plate is arranged is parallel to the plane on which the second rotation adjusting plate is arranged, the second rotation support plate and the second rotation adjusting plate are arranged at both sides of the lens clamping seat, and the plane on which the second rotation support plate is arranged is perpendicular to the plane on which the first rotation support plate is arranged. The invention can accurately adjust the verticality of the lens and has the characteristics of simple structure, convenient adjustment, economy and practicability.

Description

technical field [0001] The invention relates to chip scanning equipment technology, in particular to a five-degree-of-freedom lens adjustment device. Background technique [0002] The sorting of chips such as LED chips is a key link in the industrial production process of chips, which provides necessary data parameters for the subsequent process. Chip sorting is usually carried out as follows: the chips are located on the surface of the supply platform Wafer, the scanning system is located on the upper part of the supply platform Wafer, and the images of the chips scanned by the scanning system are used, and then the chips are sorted according to the scanning results. Therefore, the key to the success or failure of chip sorting depends on the accurate positioning of the chip position by the scanning system. [0003] In the prior art, the adjustment of the scanning lens mostly adopts a three-dimensional adjustment mechanism to adjust the position of the scanning lens. Howev...

Claims

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Application Information

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IPC IPC(8): G02B7/02
Inventor 李斌吴涛黄禹郑振华李海洲龚时华
Owner DG HUST MFG ENG RES INST
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