Anti-reflection plate and manufacturing method for anti-reflection structure thereof
A manufacturing method and anti-reflection technology, applied in gaseous chemical plating, coatings, instruments, etc., can solve the problems of time-consuming process, difficult control of multi-layer film yield, high cost, etc.
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Embodiment 1
[0049] Please refer to figure 1 , which is a flow chart showing the steps of forming the anti-reflective plate according to Embodiment 1 of the present invention. and please also refer to Figure 2A , which shows a schematic diagram of the object to be treated and the atmospheric plasma equipment. Firstly, as shown in step 11 , an object to be treated 100 is provided in the reaction zone 6 , and the object to be treated 100 is placed on the platform 5 with the exposed surface 101 under the plasma gun 2 . In this embodiment, the object 100 to be processed is, for example, a substrate. The material of the object 100 to be processed may be glass or polymethyl methacrylate (PMMA), used as a protective cover or window glass for a display, or a silicon wafer used to manufacture a solar panel.
[0050] Next, as shown in step 12 , plasma is provided to originate in the reaction zone 6 . The plasma source can be at least one of inert gas, air, nitrogen, oxygen, fluorocarbon gas and...
Embodiment 2
[0060] The difference between the second embodiment and the anti-reflection sheet of the first embodiment lies in that the anti-reflection sheet of the second embodiment forms a micro-protrusion structure by plasma coating under normal pressure. Please refer to Figure 4 , which is a flow chart showing the steps of forming the anti-reflection plate according to the second embodiment of the present invention. and please also refer to Figure 5A , which shows a schematic diagram of the substrate to be coated and the atmospheric plasma equipment.
[0061] First, as shown in step 21 , the object to be coated 200 is provided in the reaction zone 6 , and the exposed surface 201 of the object to be coated 200 is placed on the platform 5 and located under the plasma gun 2 . In this embodiment, the object to be coated 200 is, for example, a substrate. The material of the object to be coated 200 is, for example, PMMA, silicon wafer, polycarbonate (Polycarbonate, PC) or glass.
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Abstract
Description
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Application Information
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