Cavity door fixing device

Abstract

The invention discloses a cavity door fixing device which is applicable to fixing a cavity door on a cavity body wall and can realize unfixing. The device comprises a handle, a retaining piece and a spring, wherein the handle stretches out of a boss convexly, the boss stretches out of a connecting rod; the tail end of the connecting rod is provided with screw thread to form a screw thread part, the boss is provided with a first circular slot surrounding the connecting rod, the spring is penetrated through the connecting rod, one end of the spring is arranged in the first circular slot, and the other end of the spring stretches out of the first circular slot; the cavity door is penetrated with a mounting hole, the cavity body wall is provided with a threaded hole with internal thread and corresponding to the mounting hole, the connecting rod penetrates through the mounting hole, and the screw thread part stretches out of the mounting hole; the retaining piece is clamped on the connecting rod and positioned between the screw thread part and the boss; the retaining piece resists against the internal surface of the cavity door in a separation way; and the boss resists against the external surface of the cavity door in a separation way. The cavity door fixing device of the invention can share the oppression quantity of a sealing ring on the cavity door and ensure the cavity door not to fall off when the cavity door is opened.

Description

technical field [0001] The invention relates to a fixing device for plate parts, in particular to a fixing device for a door which is suitable for fixing a door on a wall of a cavity and can be released from fixing. Background technique [0002] In the manufacturing process of semiconductor devices or flat panel display devices, in order to ensure a high degree of cleanliness, it is often necessary to complete various processes in vacuum equipment, so the equipment used to manufacture semiconductor devices or flat panel display devices is generally designed so that the substrate Transport it to vacuum equipment and use plasma to perform the required process on the substrate. Taking the vacuum evaporation of OLED (Organic Light-Emitting Diode) as an example, the processed substrate is transported to the sealed vacuum process chamber, Under vacuum conditions, the solid material in the vacuum process chamber is heated and evaporated, and the evaporated atoms or molecules are fr...

AI Technical Summary

Problems solved by technology

[0004] As shown in Figure 1, the existing device for fixing the chamber door 200' on the chamber wall 100' generally adopts a knob 300' with embossing, the head 301' of the knob 300' has threads, and the middle part has Embossing 302`, and a mounting hole 201` corresponding to the knob 300` is opened on the chamber door 200`, and the knob 300` is installed in the mounting hole 201` on the chamber door 200` and passes through the mounting hole 201`, the cavity The body wall 100` is provided with a threaded hole 101` corresponding to the installation hole 201`, which is used to cooperate with the knob 300`. When the chamber door 200` is closed, the head 301` of the knob 300` is screwed into the chamber wall 100` The threaded hole 101' on the upper part makes the door 200' and the chamber wall 100' fixed, and the door 200' is pressed against the chamber wall 100' to realize the sealing of the vacuum process chamber; however, in order to maintain the seal of the vacuum process chamber, a maximum Screw in the embossed knob 300` as much as possible, so that all the pressure needs to be borne by the sealing ring 202` on the chamber door 200`, resulting in excessive compression of the sealing ring 202` and affecting the sealing effect, and also shortening the sealing ring 202 ` service life; when the chamber door 200` needs to be opened, the knob 300` needs to be screwed out of the threaded hole 101` on the chamber wall 100`, so that the knob 300` is easy under the action of gravity when the chamber door 200` is opened. Breaking away from the installation hole 201` on the chamber door 200` brings a lot of inconvenience to use

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