Unlock instant, AI-driven research and patent intelligence for your innovation.

Air extraction device

A technology of air extraction device and air inlet, which is applied in the direction of liquid variable capacity machinery, machine/engine, mechanical equipment, etc., can solve the problems of product production cost increase, energy consumption, heating device cost, etc., to achieve energy saving, The effect of reducing the amount of production and reducing the frequency

Inactive Publication Date: 2012-02-01
AU OPTRONICS CORP
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method not only requires the cost of the heating device, but also consumes additional energy, resulting in an increase in the production cost of the product

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Air extraction device
  • Air extraction device
  • Air extraction device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0055] figure 2 It is a schematic diagram of an air extraction device according to an embodiment of the present invention. Please refer to figure 2 , the air extraction device 200 of this embodiment includes a pump 210 and a conduit 220 . The pump 210 has a tank body 212 , and the tank body 212 has a first air inlet 211 , a second air inlet 213 and an exhaust port 215 . The conduit 220 has a first end section 222 , a second end section 224 and a heat exchange section 226 connected to the first end section 222 and the second end section 224 . The heat exchange section 226 contacts the outer wall of the tank body 212 , and the second end section 224 is connected to the second air inlet 213 .

[0056] In the above air extraction device 200, the pump 210 is, for example, a dry pump. The first air inlet 211 is arranged at the top 217 of the tank body 212, the exhaust port 215 is arranged at the bottom 219 of the tank body 212, and the second air inlet 213 is arranged between ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

An air extraction device includes a pump and a conduit. The pump has a tank body, and the tank body has a first air inlet, a second air inlet and an exhaust port. The conduit has a first end section, a second end section, and a heat exchange section connected between the first end section and the second end section, wherein the heat exchange section contacts the outer wall of the tank body, and the second end section is connected to the second inlet breath. The gas can pass into the tank body through the conduit, and the heat energy of the tank body can be used to heat the gas in the conduit.

Description

【Technical field】 [0001] The present invention relates to an air extraction device, and in particular to an air extraction device capable of feeding gas into a pump (pump). 【Background technique】 [0002] In the semiconductor or optoelectronic industry, many processes need to be carried out in a vacuum chamber, so vacuum equipment is required. Moreover, corrosive gases are often used in the manufacturing process, so when using vacuum equipment to pump these toxic gases in the vacuum chamber to the factory side, nitrogen gas is often used to dilute and purify the corrosive gases. [0003] figure 1 It is a schematic diagram of a dry pump of an existing vacuum equipment. Please refer to figure 1 , the existing dry pump 100 has a tank body 110 , and the tank body 110 has a first air inlet 112 , a second air inlet 114 and an exhaust port 116 . The height position of the second air inlet 114 is between the first air inlet 112 and the air outlet 116 . The gas in the vacuum cha...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/06
Inventor 吴仲尧陈振维王春盛杨胜淼廖仁助
Owner AU OPTRONICS CORP