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Pressing device

A heating device and stamping technology, applied in optics, opto-mechanical equipment, instruments, etc., can solve the problems of pattern transfer distortion, unbalanced pressing, uneven pressure, etc.

Inactive Publication Date: 2013-01-09
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, if it is necessary to realize the transfer of fine structure patterns, such as the transfer of nanometer-sized patterns, it is necessary to ensure that the stamper is pressed into the substrate in balance, uniformity and perpendicularity to the substrate surface. Balanced, pressed in a way inclined to the substrate surface, will cause distortion of pattern transfer

Method used

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Embodiment Construction

[0012] The imprinting device provided by the technical solution will be described in detail below with reference to the drawings and embodiments.

[0013] see figure 1 The imprinting device 100 provided by an embodiment of the technical solution includes a substrate platform 10 , a drive assembly 20 , a control assembly 30 , a guide rail 40 , a radial ring magnet 60 , an integer-turn coil 70 , a connection assembly 50 and a stamper 80 .

[0014] The substrate platform 10 has a carrying surface 11 parallel to the horizontal plane, which is used for carrying the substrate to be imprinted.

[0015] The driving assembly 20 is disposed above the substrate platform 10 and can be a common air cylinder or other common driving structures. The guide rail 40 passes through the top surface and the bottom surface of the driving assembly 20 . The control assembly 30 is connected with the drive assembly 20 for controlling the operation of the drive assembly 20 , so that the drive assembly ...

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Abstract

The invention relates to a pressing device, which comprises a drive element, a pressing mould, a radial annular magnet and integer turns of coils wound on a sidewall of the radial annular magnet and connecting assembly with elastic deformation. An axial end of the radial annular magnet is connected with the drive element, while the other axial end is fixedly connected with the pressing mould. The pressing device has high verticality and can improve the accuracy of pressed pattern transfer.

Description

technical field [0001] The invention relates to the technical field of embossing, in particular to an embossing device capable of precisely transferring patterns. Background technique [0002] Imprinting technology, as a technology that can repeatedly transfer pattern structures in large quantities, has been widely used in the preparation of micro-electromechanical chips, magnetic storage, optoelectronic and optical devices, biochips and microfluidic devices. Embossing technology is mainly divided into three types: hot embossing, ultraviolet imprinting and micro-contact imprinting. [0003] The thermal embossing or ultraviolet imprinting device is to press the stamper directly into the glue provided on the surface of the substrate by means of mechanical pressure, which generally includes a driving component, a stamper and a substrate platform. The driving assembly is driven by mechanical or hydraulic / pneumatic pressure, and is used to drive the stamper connected to it to mo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00
Inventor 黄雍伦
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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