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Ageing test system

A technology of aging test and test module, applied in electronic circuit test, single semiconductor device test, static memory and other directions, can solve the problems of inaccurate screening results of semiconductor devices and limited test functions, so as to solve the problem of inaccurate screening results and easy to master , easy to use and maintain

Active Publication Date: 2010-10-13
北京新润泰思特测控技术有限公司
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AI Technical Summary

Problems solved by technology

[0007] The invention provides an aging test system, which solves the problem of inaccurate screening results of semiconductor devices due to limited testing functions in the existing aging test system

Method used

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Embodiment Construction

[0040] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0041] The processing method of the present invention can be widely used in various fields, and can utilize many suitable materials to make, and below is to illustrate by preferred embodiment, certainly the present invention is not limited to this specific embodiment, this field Common replacements known to those skilled in the art undoubtedly fall within the protection scope of the present invention.

[0042] Secondly, the present invention is described in detail using schematic diagrams. When describing the embodiments of the present invention in detail, for the convenience of explanation, the schematic diagrams showing the structure of the device will not be partially enlarged according to the general scale, which should not be used ...

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Abstract

The invention discloses an ageing test system, which comprises an ageing test box, a test module, a data processing module and a system control module, wherein the test module is used for testing function and / or direct current and / or alternating current parameters of components to be subjected to an ageing test; the data processing module is used for processing test data obtained by the test module; the system control module is used for sending out various control signals to control completion of the ageing test; and the ageing test box is internally provided with at least one adaptive plate for placing the components to be subjected to the ageing test, and the at least one adaptive plate, the test module, the data processing module and the system control module are connected via interfaces. The ageing test system in the invention solves the problem of the inaccurate screening result of a semiconductor component due to the limited test functions in the existing ageing test system.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing and mechanical processing, in particular to an aging test system. Background technique [0002] After manufacture, integrated circuit (IC) chips must be tested, usually burn-in tests at elevated temperatures. Aging test can accelerate the aging of chips, and can identify and discard defective chips early in the manufacturing process. [0003] At present, the screening technology for the quality of semiconductor devices in the aging process still stays at the more traditional power-on aging level. The traditional aging method is to put the semiconductor device to be aging test into the high temperature aging test area, in the high temperature environment of 80°C-125°C, for several hours, such as 96 hours, input 50% at each pin The square wave signal of the duty cycle, and by monitoring whether the square wave signal degrades at each pin, it is judged whether the internal circuit of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/28G01R31/26G11C29/00
Inventor 沈冲陈剑晟王斌羡迪新陈驰高建辉
Owner 北京新润泰思特测控技术有限公司
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