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Buckling-based low-voltage large-deformation micro-driver

A micro-actuator and large-deformation technology, applied in the field of micro-mechanics, can solve the problems such as the inability of the cantilever beam to achieve post-buckling symmetrical deformation, increase the fracture risk of the cantilever beam, and the disturbance in the horizontal direction, so as to avoid secondary buckling deformation, low cost, and buckling deformation. symmetrical effect

Inactive Publication Date: 2010-11-24
XIDIAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] 1) The driving force to achieve post-buckling deformation is too large, which is difficult to achieve in practical engineering applications
[0008] 2) During the deformation process, when the mass block 23 breaks away from the constraint of the hinge 22, there is a horizontal disturbance, which makes the cantilever unable to achieve the pre-designed post-buckling symmetric deformation
[0009] 3) Due to the buckling deformation of double cantilever beams, the risk of cantilever beam fracture is increased

Method used

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  • Buckling-based low-voltage large-deformation micro-driver
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Embodiment Construction

[0028] The buckling-based low-voltage large-deformation micro-actuator of the present invention uses micro-mechanical technology to release the extrusion potential energy stored in the assembly to the large deformation, fast response and sudden jump characteristics shown in the driving deformation, breaking through the tradition that the elastic force is the resistance The idea is to transform the elastic force into the main driving force, so as to realize the design purpose of small driving voltage, large driving displacement and small response time.

[0029] refer to image 3 , the whole driver is mainly made up of fixed base 38, micro-beam 34, outer frame 37. Wherein the material of the outer frame 37 is silicon, and an upper top cover 40 and a lower bottom cover 39 are fixed at both ends. The inner sides of the upper top cover 40 and the lower bottom cover 39 are 14.9 mm long, and gold films are deposited on their inner wall surfaces. The material of fixed base 38 is sili...

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Abstract

The invention discloses a buckling-based low-voltage large-deformation micro-driver, belongs to the field of micro-machinery, and mainly solves the problems of overhigh drive voltage, over-small drive displacement and long response time of the existing micro-driver. The driver comprises a micro-beam (34), a fixed mount (38) and a drive circuit (33), wherein the micro-beam (34) is fixed by an external structure (37), and an upper top cover (40) and a lower bottom cover (39) are fixed at two ends of the external structure; an upper guide slot (31) and a lower guide slot (35) are fixed at two ends of the fixed mount (38) for limiting side-to-side movement of the micro-beam; and a pair of regulation electrode pair (32, 36) are formed between the upper guide slot (31) and the upper top cover (40) and between the lower guide slot (35) and the lower bottom cover (39). The driver has the advantages of strong interference resistance, small drive voltage, large drive displacement and short response time, and can be used for radio frequency RF switches, photoswitches, micro-programmable optical-mechanical systems and spatial carrier SBR oriented variable phased-array antenna.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanics, and in particular relates to a buckling micro-driver, which can be used for radio frequency RF switches, optical switches, micro-programmable grating systems and space-borne SBR pointing variable phased array antennas. technical background [0002] The buckling micro-actuator is processed by micro-mechanical technology. It breaks through the traditional concept that the elastic force is the restoring force, and uses the elastic energy release and stiffness changes of the micro-beam during buckling deformation to change the elastic force into The driving force is to realize the purpose of driving the micro-driver with large displacement, low voltage and fast response. It has the characteristics of small size, high reliability, and simple structure, so it has a strong demand in the drive fields of radio frequency RF switches, optical switches, micro-programmable gratings, and space-borne SB...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/00
Inventor 田文超李雪梅杨银堂
Owner XIDIAN UNIV
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