Buckling-based low-voltage large-deformation micro-driver

Abstract

The invention discloses a buckling-based low-voltage large-deformation micro-driver, belongs to the field of micro-machinery, and mainly solves the problems of overhigh drive voltage, over-small drive displacement and long response time of the existing micro-driver. The driver comprises a micro-beam (34), a fixed mount (38) and a drive circuit (33), wherein the micro-beam (34) is fixed by an external structure (37), and an upper top cover (40) and a lower bottom cover (39) are fixed at two ends of the external structure; an upper guide slot (31) and a lower guide slot (35) are fixed at two ends of the fixed mount (38) for limiting side-to-side movement of the micro-beam; and a pair of regulation electrode pair (32, 36) are formed between the upper guide slot (31) and the upper top cover (40) and between the lower guide slot (35) and the lower bottom cover (39). The driver has the advantages of strong interference resistance, small drive voltage, large drive displacement and short response time, and can be used for radio frequency RF switches, photoswitches, micro-programmable optical-mechanical systems and spatial carrier SBR oriented variable phased-array antenna.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanics, and in particular relates to a buckling micro-driver, which can be used for radio frequency RF switches, optical switches, micro-programmable grating systems and space-borne SBR pointing variable phased array antennas. technical background [0002] The buckling micro-actuator is processed by micro-mechanical technology. It breaks through the traditional concept that the elastic force is the restoring force, and uses the elastic energy release and stiffness changes of the micro-beam during buckling deformation to change the elastic force into The driving force is to realize the purpose of driving the micro-driver with large displacement, low voltage and fast response. It has the characteristics of small size, high reliability, and simple structure, so it has a strong demand in the drive fields of radio frequency RF switches, optical switches, micro-programmable gratings, and space-borne SB...

AI Technical Summary

Problems solved by technology

[0007] 1) The driving force to achieve post-buckling deformation is too large, which is difficult to achieve in practical engineering applications

[0008] 2) During the deformation process, when the mass block 23 breaks away from the constraint of the hinge 22, there is a horizontal disturbance, which makes the cantilever unable to achieve the pre-designed post-buckling symmetric deformation

[0009] 3) Due to the buckling deformation of double cantilever beams, the risk of cantilever beam fracture is increased

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