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Micro-electro-mechanical-system microphone

A micro-electro-mechanical system and microphone technology, which is applied to the components of the TV system, generators/motors, and televisions, can solve the problems of the vibrating membrane and the back plate being easily attracted, the microphone not working normally, and the limitation of the micro-electro-mechanical system microphone. Performance and other issues, to achieve the effect of preventing suction

Inactive Publication Date: 2011-01-26
AAC ACOUSTIC TECH (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] And the vibrating membrane and the backplate of the MEMS microphone of the related art adopt Si or SiO 2 or Si 3 o 4 Or polysilicon material is doped with a conductor made of metal material, so the vibrating membrane and the back plate are prone to pull-in at the pull-in voltage. Once the pull-in occurs, the MEMS microphone of the related technology will not work normally, which limits the Performance of Micro-Electro-Mechanical System Microphones of Related Art

Method used

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Embodiment Construction

[0019] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0020] The first embodiment of the MEMS microphone 1 provided by the present invention:

[0021] Such as figure 1 , figure 2 and image 3 As shown, the MEMS microphone 1 of the present invention includes: a back plate 3 and a diaphragm 2 opposite to the back plate 3 , wherein the MEMS microphone 1 is also provided with a base 4 supporting the back plate 3 . The diaphragm 2 is provided with a vibrating part 21 and a connecting part 22 connecting the vibrating part 21 . The vibrating part 21 is circular; the connecting part 22 is made of Si or SiO 2 or Si 3 o 4 or polysilicon material doped with metal, its function is to fix the diaphragm 2 on the base 4; the back plate 3 is provided with a main body portion 31 and a support portion 32 supporting the main body portion 31, and the support portion 32 is used to hold the back plate 3 fixed on base 4....

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Abstract

The invention provides a micro-electro-mechanical-system microphone. The microphone comprises a back plate and a diaphragm which is opposite to the back plate, wherein the back plate is provided with a main body part; the diaphragm is provided with a vibration part; an insulating layer which completely covers the main body part or the vibration part is arranged between the diaphragm and the back plate; when the insulating layer completely covers the main body part, a gap is formed between the insulating layer and the vibration part; and when the insulating layer completely covers the vibration part, a gap is formed between the insulating layer and the main body part. The micro-electro-mechanical-system microphone can effectively prevent the diaphragm from pulling in the back plate at pull-in voltage during work.

Description

【Technical field】 [0001] The invention relates to a microelectromechanical system microphone, in particular to a microelectromechanical system microphone with a composite diaphragm structure. 【Background technique】 [0002] With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important. The microphone of a mobile phone is used as a voice pick-up device for the mobile phone, and its design directly affects the call quality. [0003] Micro-Electro-Mechanical-System Microphone (MEMS for short) is a related technology microphone that is widely used and has better performance. Its packaging volume is smaller than that of traditional electret microphones, which includes: back plate , su...

Claims

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Application Information

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IPC IPC(8): H04R19/04B81B7/02
Inventor 杨斌孟珍奎
Owner AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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