Flash light annealing for thin films
A technology of light source and pulse light source, which is applied in the field of pulse flood light source and can solve the problems of lack of high-quality crystal film practical technology
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[0053] The present application provides methods and systems for efficiently and cost-effectively producing silicon thin films suitable for use in solar cells. This application uses flash lamp technology or other low cost pulsed flood sources such as diode lasers to provide pulsed melting of silicon films under conditions that provide a mixed liquid / solid phase. The solid phase provides seed sites for crystalline growth of silicon from the liquid phase. Under suitable conditions, highly textured poly-Si layers were obtained. In one or more embodiments, a poly-Si layer having a strong (100) texture is provided. The present application also uses a flash lamp anneal to create a seed layer in the epitaxial growth process used to fabricate solar cells. As will be apparent from the description below, the method is not limited to silicon thin film crystallization and can be used for any thin film that exhibits increased reflectivity upon melting. For the purposes of the discussion ...
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