Autorotation type work frame mechanism of vacuum evaporation coating
A vacuum coating and scaffolding technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., to achieve the effect of improving stability
Inactive Publication Date: 2011-04-06
TIANJIN QIANYU ELECTRONICS
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Problems solved by technology
Since the product cannot be rotated, the coating of the workpiece is uneven, and the qualified rate is only 30%.
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[0013] Below in conjunction with the preferred embodiments, the specific implementation methods provided according to the present invention are described in detail as follows: See the accompanying drawings for details, a self-rotating work frame mechanism for vacuum coating, including the driving gear 1 of the output shaft of the motor and the large teeth meshing with it Disc 2, on the same circumference of the large toothed disc, there are four to five work frame pinion pairs, the work frame pinion gear 3 meshes with the fixed large gear 4, the small shaft 5 center hole of the work frame pinion pair is inserted into the work frame 6, The large toothed plate is slidingly connected with the inner ring of the fixed large gear through the limit guide wheel 7, and the large toothed plate is connected with the revolving upper plate 6-1 through several pillars 6-2, and the work frame 6 is provided with a workpiece Rotation mechanism. The workpiece rotation mechanism is mainly compos...
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The invention relates to an autorotation type work frame mechanism of a vacuum evaporation coating, which comprises a driving gear of a motor output shaft and a gearwheel disc engaged with the driving gear, wherein a plurality of work frame pinion pairs are arranged on the same circumference of the gearwheel disc, work frame pinions are engaged with fixed gearwheels, a small shaft center hole of the work frame pinion pairs is spliced with a work frame, and the gearwheel disc is glidingly connected with a fixed gearwheel inner ring through position limiting guide wheels and is connected with a revolution upper top disc through a plurality of struts. The autorotation type work frame mechanism is characterized in that a workpiece autorotation mechanism is arranged on the work frame, and a main shaft of the work frame is in keyed connection with the workpiece autorotation mechanism arranged above a bottom disc. The autorotation type work frame mechanism has the advantages that the quality stability of films is improved through the continuous revolution and the autorotation of the evaporated workpieces in the horizontal direction in the vacuum evaporation coating process, and the qualification rate is improved from 30 percent to above 85 percent.
Description
technical field [0001] The invention belongs to vacuum coating equipment, in particular to a self-rotating working frame mechanism for vacuum coating. Background technique [0002] At present, with the rapid development of mobile phones, cosmetics, optics, and optoelectronics industries, many irregular-shaped components, such as circular rings and cylinders, have appeared. The currently commonly used coating machines generally have only one vertical axis of rotation. Its structural principle is: the gear of the output shaft of the motor is engaged with the large toothed disc to rotate, and a number of workpiece pinion gears are arranged on the circumference of the large toothed disc and meshed with the fixed large gear, driving the work frame coaxial with the pinion to revolve, and the large toothed disc Rotately connect with the inner ring of the fixed bull gear through the limit guide wheel. Since the product cannot be rotated, the coating of the workpiece is uneven, ...
Claims
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IPC IPC(8): C23C14/50
Inventor 许述芝董永顺
Owner TIANJIN QIANYU ELECTRONICS