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Cassette transport apparatus

A technology for conveying devices and cassettes, which is applied to storage devices, transportation and packaging, electrical components, etc., can solve the problems of reduced cleanliness in the internal space of cassettes, and achieve the effect of simple structure, large size and small size

Active Publication Date: 2011-04-13
DAIFUKU CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the above-mentioned clean cassette is transported between the rack body and the glass substrate unloading operation part or the glass substrate loading operation part by means of the traveling crane, even if it is assumed that from the lifting conveyor side of the traveling crane, power can be supplied to the clean card. For the FFU of the cassette, during the transport of the cassette, the ambient gas in the warehouse will also enter through the large opening for substrate access, which will reduce the cleanliness of the internal space of the cassette

Method used

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Embodiment Construction

[0068] based on Figure 1 to Figure 11 First embodiment of the present invention is described as follows: as figure 1 As shown, the cassette conveying device (カセツト conveying device) 1 of the present invention is supported by a support guide rail 4 laid on the ground in the walking path 3 between two rows of frame bodies 2A and 2B arranged side by side, and along the two rows Frame body 2A, 2B walks by itself. On the two frame bodies 2A, 2B, a cassette storage compartment 7 is three-dimensionally arranged, and the cassette storage compartment 7 accommodates the clean cassette 6, and a single cassette storage compartment 7 is respectively provided at the frame body 2A on one side to form a The substrate unloading operation part 8 and the substrate loading operation part 9 are provided, and the substrate unloading robot device 12 and the substrate storage robot device 13 are provided at the same time. In the cassette 6, the substrates 10 are taken out one by one and carried int...

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Abstract

A cassette transport apparatus closes an opening for the access of a substrate of the cassette when the cassette for accommodating the substrates is conveyed from a frame to a substrate transport operation part. Therefore, in the conveying process, the ambient air in the cassette can be kept well. On a lifting transporter (15), a cassette transport supporting bracket (20) which horizontally advances and retreats freely is provided between a retreating position on the lifting transporter (15) and an advancing position for advancing to a transverse side. The utility model is characterized in that: on the lifting transporter (15), a supporting part (turntable (16)) which horizontally supports a cassette transport supporting bracket (20) is provided with a cover (22). The cover (22) closes a substrate access opening (6a) of the cassette (6) which is supported on the cassette transport supporting bracket (20) and is transported to a certain position of the lifting transporter (15).

Description

technical field [0001] The present invention relates to a cassette for accommodating glass substrates used in television displays, and more particularly to a conveying device called a clean cassette. Background technique [0002] The cassettes containing the above-mentioned glass substrates are temporarily stored on the racks of the automatic warehouse, and when various processes are performed on the glass substrates, they are transported from the racks to a place near the processing equipment using the overhead traveling crane of the automatic warehouse. In the glass substrate unloading operation section, the glass substrate is taken out from the cassette by the robot for taking out the glass substrate and supplied to the processing apparatus. However, the glass substrates stored in the cassettes must avoid contact with polluted ambient air. Therefore, an automatic warehouse that can maintain a clean environment in its internal space is used. However, if it is a large-scale...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G1/04
CPCH01L21/67265H01L21/67389H01L21/6773H01L21/67772
Inventor 鸟本和宏
Owner DAIFUKU CO LTD
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