Multi-chip stacking structure
A multi-chip, chip technology, applied in electrical components, electrical solid-state devices, circuits, etc., can solve problems such as lack of EDA design tools, inconsistent specifications and standards, and increased heat dissipation design complexity.
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[0048] see figure 1 as shown, figure 1 It is an embodiment of the multi-chip stack structure of the present invention, which includes:
[0049] A bottom layer 10, which is a substrate 101 with a line redistribution layer (Redistribution layer, RDL) 102;
[0050] A first chip 11, which at least includes a non-conductor layer 110 and a metal layer 111, the non-conductor layer 110 is provided with a metal-filled via 112, and the metal layer 111 is inverted (flipped) and arranged on the line reconfiguration layer 102 of the bottom layer 10 superior;
[0051] A first stacked wafer 12, which is arranged on the first wafer 11, comprising:
[0052] a metal layer 121;
[0053] A non-conductor layer 120, which is provided with a metal-filled channel 122, the metal-filled channel 122 is electrically connected with the metal-filled channel 112 of the non-conductor layer 110 of the first wafer 11; and
[0054] A second stacked wafer 13, which is arranged on the first stacked wafer 12,...
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