Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning

A technology of dynamic error and degrees of freedom, applied in turning equipment, auxiliary devices, accessories of toolholders, etc., can solve the problem that multi-axis motion servo device does not meet the performance requirements of free-form surface ultra-precision turning dynamic error cancellation device, etc. Easy-to-control implementation, high-precision effects

Active Publication Date: 2012-07-04
HUAWEI TEHCHNOLOGIES CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The invention provides a two-degree-of-freedom dynamic error offset device for free-form surface ultra-precision turning to solve the problem that the multi-axis motion servo device does not meet the performance requirements of the free-form surface ultra-precision turning dynamic error offset device.

Method used

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  • Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning
  • Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning
  • Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning

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Embodiment Construction

[0021] The left side panel 4, the right side panel 6 and the front cover 3 are fixedly connected with the base 1 and the upper cover 5 respectively, and the two-degree-of-freedom flexible hinge mechanism 12 is positioned and fixedly connected with the base 1 by bolts, The surfaces 101, 102, and 103 are positioned, the diamond tool 2 is fixedly connected to the two-degree-of-freedom flexible hinge mechanism 12, and the X-direction piezoelectric actuator 11 is respectively connected to the left column 1203 in the two-degree-of-freedom flexible hinge mechanism 12 through the X-direction U-shaped block 10. 1. The U-shaped groove on the right column 1204 is fixedly connected with the X-direction pre-tightening screw 9; the Z-direction piezoelectric actuator 13 and the Z-direction piezoelectric actuator 17 respectively pass through the Z-direction U-shaped block 14 and the Z-direction U Type block two 18, and the two U-shaped grooves at the rear of the X-direction motion platform 121...

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Abstract

The invention relates to a two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning, and belongs to the technical field of ultra-precision machining and complex curved surface optical part machining. The device consists of a base, a left side plate, a right side plate, an upper cover plate, a front cover plate, a flexible hinge mechanism, a diamond cutter, piezoelectric actuators, a capacitive displacement sensor mounting seat and a capacitive displacement sensor, wherein the mechanism has an integral structure which is symmetric about a yx plane;an X-axis motion platform is a flexible hinge guide mechanism which is driven by the piezoelectric actuators; a Z-axis motion platform is arranged on the X-axis motion platform, is connected in series with the flexible hinge guide mechanism through a lever amplifying mechanism and is synchronously driven by the two piezoelectric actuators; and the displacements of the X axis and the Z axis are detected by the capacitive displacement sensor respectively. The device has the advantages that: the motion between the X axis and the Z axis is decoupled, parasitic motion is not produced, and the device has the characteristics of high accuracy and low and medium frequency or medium and high frequency response.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision machining and processing of optical parts with complex curved surfaces, and relates to a two-degree-of-freedom dynamic error offset device for ultra-precision turning of free-form surfaces. Background technique [0002] The machining accuracy and surface quality of the current ultra-precision lathe can be improved by using the dynamic error cancellation method. So far, the error cancellation of free-form surface ultra-precision turning is mainly for low-frequency errors (static or quasi-static errors), and there are few for medium-low frequency or medium-high frequency dynamic errors, and in these technical solutions, single-freedom is basically used. Degree of error cancellation device. In the ultra-precision turning of free-form surface, the comprehensive error of the tool and the workpiece not only depends on the position coordinates of the rotary axis and the translation axis, but als...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23B25/06
Inventor 周晓勤段宁华林洁琼刘强
Owner HUAWEI TEHCHNOLOGIES CO LTD
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