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Carbon nano tube film three-electrode gas humidity sensor and humidity measuring method thereof

A technology of carbon nanotube film and humidity sensor, which is applied in the field of three-electrode gas humidity sensor and its humidity measurement

Inactive Publication Date: 2011-06-15
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The breakdown voltage and humidity of the two-electrode sensor have multi-value nonlinear characteristics, and there is no carbon nanotube film two-electrode humidity sensor

Method used

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  • Carbon nano tube film three-electrode gas humidity sensor and humidity measuring method thereof
  • Carbon nano tube film three-electrode gas humidity sensor and humidity measuring method thereof
  • Carbon nano tube film three-electrode gas humidity sensor and humidity measuring method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0034] like figure 2 , image 3 As shown, the carbon nanotube thin film three-electrode gas humidity sensor consists of three electrodes stacked one after the other from top to bottom. The three stacked electrodes are respectively provided with a first electrode 1, a second electrode 2 and a third electrode. Electrode 3, the first electrode 1 of which is made of a base 5 with a carbon nanotube film 6 distributed on the inner surface and an electrode 4 with air holes; ; The third electrode 3 is composed of collectors with blind holes on the electrode plate surface; the three electrodes are separated from each other by insulating pillars 7 .

[0035] figure 2 In the shown embodiment of the carbon nanotube film three-electrode gas humidity sensor, there are two vent holes on the electrode surface of the first electrode 1, and the vent holes are circular; carbon nanotubes are bonded to the surface of one side of the vent holes The film substrate 5 is distributed with a carbon...

Embodiment 2

[0043] The basic structure of this embodiment is the same as that of Embodiment 1, the difference is that the electrode spacing between two adjacent electrodes in the three electrodes of the carbon nanotube film three-electrode gas humidity sensor is 250 μm and 30 μm respectively, and the first electrode 1 and the second electrode Electrode 2 polar plate facing area is 0.01mm 2 , the area of ​​the plate facing the second electrode 2 and the third electrode 3 is 0.01mm 2 .

[0044] There is one vent hole on the electrode surface of the first electrode 1, and the vent hole is quadrilateral, pentagonal or hexagonal; the second electrode 2 has 4 center lead-out holes, and the lead-out holes are quadrilateral, pentagonal or hexagonal ; The number of blind holes in the third electrode 3 is 4, and the blind holes are 3-6 prisms or pyramids.

[0045] The humidity measuring method of the present embodiment is basically the same as embodiment 1, the difference is:

[0046] The cathod...

Embodiment 3

[0048] The basic structure of this embodiment is the same as that of Embodiment 1, the difference is that the electrode spacing between two adjacent electrodes in the three electrodes of the carbon nanotube film three-electrode gas humidity sensor is 250 μm and 30 μm respectively, and the first electrode 1 and the second electrode Electrode 2 plate facing area is 10mm 2 , the area of ​​the plates facing the second electrode 2 and the third electrode 3 is 100mm 2 .

[0049] There are 4 vent holes on the electrode surface of the first electrode 1, and the vent holes are quadrilateral, pentagonal or hexagonal; the second electrode 2 has 2 central lead-out holes, and the lead-out holes are quadrilateral, pentagonal or hexagonal ; The number of blind holes in the third electrode 3 is 2, and the blind holes are 3-6 prisms or pyramids.

[0050] The humidity measuring method of the present embodiment is basically the same as embodiment 1, the difference is:

[0051] The cathode vol...

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Abstract

The invention discloses a carbon nano tube film three-electrode gas humidity sensor and a humidity measuring method thereof; the sensor comprises a first, a second and a third electrodes distributed in sequence; the first electrode is provided with an air vent, and the inner surface of the first electrode is bonded with a substrate distributed with a carbon nano tube film; the center of the second electrode is provided with an exist aperture; the surface of the third electrode is provided with a blind hole; and the three electrodes are separated from each other. The method comprises the following steps of: 1) arranging the air humidity sensor; 2) applying voltages on the electrodes; 3) measuring the sensor to output ion flow value; 4) forming a sample by detected value and gas humidity calibration value and constructing a gas humidity measuring database with a interpolation sample; 5) constructing a data fusion instrument and building a gas humidity measuring model; 6) inputting the measured value of the sensor to the measuring model, and obtaining the accurate measuring value of gas humidity. The working voltage of the gas humidity sensor is low, the flexibility of the measured gas humidity is high, the linearity is good, the precision is high, and the sensor and the device can be used for measuring the humidity of inflammable, explosive and poisonous gas.

Description

technical field [0001] The invention relates to the field of gas humidity detection, in particular to a three-electrode gas humidity sensor based on carbon nanotube film and gas discharge principle and a humidity measurement method thereof. Background technique [0002] With the urgent need of gas detection in all walks of life and the development of nanotechnology, nanosensors have made great progress. Especially with the discovery of carbon nanotubes at the end of the 20th century, carbon nanotubes have shown attractive application prospects in the fields of gas, temperature and humidity detection. The carbon nanotube thin film two-electrode sensor in the carbon nanotube humidity sensor has become a research hotspot in the field of gas humidity detection due to its advantages of high detection sensitivity, wide detection gas range, and fast response. The carbon nanotube film two-electrode gas humidity sensor is based on the principle of gas discharge and uses carbon nanot...

Claims

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Application Information

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IPC IPC(8): G01N27/64
Inventor 张勇姜为华方静王进张晶园宋晓慧王影花张建业牛国平王晓冰李昕唐建文刘君华
Owner XI AN JIAOTONG UNIV