Reciprocated lifting device

Abstract

The invention provides a reciprocated lifting device arranged on a vacuum chamber body. The reciprocated lifting device comprises a supporting plate, an installing plate, a driver, an adjusting member and a plurality of lifting rods and corrugated pipes, wherein the lifting rods and the corrugated pipes correspond one by one; the supporting plate is positioned outside the chamber body and is parallel to a bottom plate of the chamber body; the installing plate is positioned below the supporting plate and fixedly connected with the bottom plate of the chamber body; the lower ends of the liftingrods are all fixed on the supporting plate, and the upper ends of the lifting rods all hermetically extend to the vacuum chamber and form a supporting face for bearing a workpiece; the upper end of the adjusting member is in rotatable blocked connection with the supporting plate, the lower end of the adjusting member is in sleeved threaded connection with an output shaft of the driver, and the driver is arranged on the installing plate; the corrugated pipes are sleeved outside the lifting rods positioned outside the chamber body, the upper ends of the corrugated pipes are hermetically connected with the chamber body, and the lower ends of the corrugated pipes are hermetically connected with the supporting plate; and the driver drives the supporting plate to do a linear reciprocated motionthrough the adjusting member. Due to the adoption of the adjusting member and the corrugated pipes, the reciprocated lifting device has the advantages of simple structure, lower cost, fine-adjustmentaccuracy and longer service life.

Description

technical field [0001] The invention relates to a lifting device, in particular to a reciprocating lifting device. Background technique [0002] OLED stands for Organic Light-Emitting Diode (Organic Light-Emitting Diode), also known as Organic Electroluminescence Display (OELD). Because of its thinness, power saving and other characteristics, it has been widely used on the display screen of digital products, and has great market potential. At present, the application of OLED in the world is focused on flat panel display, because OLED is the only one in the application A technology that can be compared with TFT-LCD, OLED is the only display technology that can produce large-size, high-brightness, and high-resolution soft screens among all current display technologies, and can be made into the same thickness as paper. [0003] OLED display screens are different from traditional TFT-LCD display screens in that they do not require a backlight, and use very thin coatings of orga...

AI Technical Summary

Problems solved by technology

However, the existing lifting devices generally can only roughly control the distance between the heating plate and the workpiece, and cannot accurately fine-tune the distance between the heating plate and the workpiece; or although they can adjust the distance between the heating plate and the workpiece Fine-tuning, but there are problems such as poor fine-tuning effect, complex structure and high manufacturing cost

Simultaneously, the seal between the lifting rod and the cavity of the existing lifting device that extends into the vacuum cavity to carry the workpiece up and down is sealed by the rubber sealing ring arranged between the lifting rod and the cavity, and the rubber sealing ring The sealing of the lifting rod and the cavity is realized by the close contact between the outer side of the rubber sealing ring and the cavity and the close contact between the inner side of the rubber sealing ring and the lifting rod, which makes the rubber sealing ring extremely easy to wear, thus increasing the life of the lifting device. maintenance time

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