Laser scribing method and device
A laser scribing and laser technology, applied in laser welding equipment, welding equipment, metal processing equipment, etc., can solve problems such as unfavorable cost and complicated equipment
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[0075] In the case of forming a scribed groove on a workpiece using a laser scribing device that splits the laser light emitted from a laser source to form multiple beam spots, the relationship between the out-of-focus position and the depth of the groove was studied. .
[0076] The laser scribing device is used figure 2 In the shown laser scribing device, the components of the 1 / 4 wavelength plate are omitted.
[0077] As a laser source, Nd:YAG laser (wavelength 1064nm, output 10W) was used. The output characteristics of the laser light were set as shown in Table 1.
[0078] For the birefringent element, a crystal plate with a wedge angle of 2° is used.
[0079] As the condenser lens, a lens with a focal length f of 50 mm is used.
[0080] The workpiece is made of alumina ceramic with a thickness of 0.28mm.
[0081] The scribing speed (moving speed of the beam spot) SP was set at 50 mm / sec.
[0082] The depth of the scribe groove was measured at points (10 μm pitch) ...
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