Elliptical polarization instrument sample room device with variable temperature and temperature change method thereof

Abstract

The invention belongs to the technical field of an optical electronic device and particularly relates to an elliptical polarization instrument sample room device with variable temperature and a temperature change method thereof. The device provided by the invention comprises a gas bottle, an air valve, an electromagnetic valve, a Dewar bottle, a sample room, a sample table, a heating resistor, a temperature sensor, a temperature controller and the like, wherein the sample room is divided into an upper cavity and a lower cavity; the lower cavity is in a cuboid shape; the side of the upper cavity is in a trapezoid shape; and optical windows are formed on the inclined planes at the two sides of the upper cavity. The temperature change method provided by the invention is divided into a high temperature mode and a low temperature mode, wherein in the low temperature mode, low-temperature liquid is heated by utilizing normal-temperature gas to generate low-temperature refrigerating gas and the low-temperature refrigerating gas is injected into the sample room through a heat-insulating gas pipeline, thus the sample table reaches the set low temperature; and in the high temperature mode, the heating is carried out through the heating resistor, thus the sample table reaches the set high temperature. The device provided by the invention has the advantages of convenient manufacture and low cost, and the temperature change method provided by the invention has the advantages of good effects and strong practicability and can be used for various elliptical polarization spectral measurements.

Description

technical field [0001] The invention belongs to the technical field of optical and electronic devices, and in particular relates to a temperature-variable ellipsometer sample chamber device and a temperature-variable method thereof. Background technique [0002] Some information function devices require to work under certain temperature conditions. For example, various types of optical discs, magnetic discs, and magneto-optical discs need to be heated by laser to make the information recording layer reach a certain temperature during the process of reading and writing information. Optical disks, magnetic disks, and magneto-optical disks are all multi-layer film structures composed of metal and dielectric layers. When working, each film layer works under a certain temperature condition, or even works under a certain temperature gradient, that is, the temperature of each film layer. Each is different. In the process of optical signal transmission, various optical filters are ...

AI Technical Summary

Problems solved by technology

At present, in ellipsometric testing, there are still not many users using variable temperature sample chambers. At present, some variable temperature sample stages use low-temperature liquid direct contact refrigeration. In this case, the structure of the sample chamber...

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