80 results about "Particle adhesion" patented technology

Any particle adhesion onto the surface of a substrate to be processed is prevented. There is provided a substrate processing apparatus characterized by including a transfer chamber for, via a gate to which a substrate accommodating container for accommodation of the substrate is set, performing transfer of the substrate between the same and the substrate accommodating container, a processing chamber for applying a specific process to the substrate, a load-lock chamber for linking the processing chamber with the transfer chamber, and a temperature control unit for at the stage of transferring the substrate into at least one of the transfer chamber and the load-lock chamber, so as for the temperature of the substrate just before the transfer thereof to be higher than the temperature of the interior of the chamber, into which the substrate will be transferred, controlling at least one of the temperature of the substrate and the temperature of the interior of the chamber.

By applying a transparent electroconductive film to a mask blank or by forming an electroconductive layer by doping metallic ions thereto, such a mask blank can be provided that an electrostatic chuck having a sufficient retaining force can be applied, the front and back surfaces of the mask blank can be measured simultaneously with ultimate accuracy, generation of dusts is extremely reduced, and charge prevention and prevention of particle adhesion are enabled, and a process for producing the mask blank, a process for using the mask blank, a mask using the mask blank, a process for producing the mask, and a process for using the mask can be also provided.

The present invention is a synthetic microfluidic microvasculature network and associated methods. The synthetic microfluidic microvasculature network mimics the structure, fluid flow characteristics, and physiological behavior of physiological microvasculature networks. Computational methods for simulating flow and particle adherence in synthetic and physiological microvascular systems and methods for determining parameters influencing particle adhesion and drug delivery are also described. The invention has many uses including the optimization of drug delivery and microvascular treatments and in describing disease mechanisms that affect the microvasculature such as inflammation, diabetes and hypertension.

The invention discloses a low-melting point PTT copolyester and a manufacturing method thereof. The copolyester takes terephthalic acid and 1,3-propylene glycol as basic monomers, 10-50wt% of m-phthalic acid is added to an acid component, and 1-20wt% of polyethylene glycol is added to an alcohol component with the total weight of the acid component as a reference. The mol ratio of the alcohol to the acid of the copolyester is 1.2-1.8:1, and the low-melting point PTT copolyester with the melting point of 130-200 DEG C and the inherent viscosity of 0.70-0.90dL/g is synthesized by esterification reaction and polycondensation reaction. The copolyester and the manufacturing method are characterized by fast reaction rate, a few side reactions, high crystallinity and uneasy particle adhesion, and the copolyester is applicable to spinning filament, short fiber and non-woven fabrics.

The invention discloses an elliptical tube H-shaped fin heat exchanger for waste heat recovery. The elliptical tube H-shaped fin heat exchanger comprises an elliptical heat exchange tube, a plurality of groups of H-shaped fins and a heat exchanger surface, wherein the H-shaped fins are sleeved on the surface of the heat exchange tube; the heat exchanger surface consists of non-uniform triangular small wings, which are elliptically arranged, on the surfaces of the H-shaped fins around the elliptical heat exchange tube. When dusty flue gas flows through the surfaces of the H-shaped fins, the small wings disturb the fluid to enhance the heat exchange on the tube wall and the downstream side, and meanwhile, the deposition of particles on the tube wall is reduced; the pressure drop can be reduced by the elliptical tube while the particle adhesion is reduced. A plurality of longitudinal vortexes are arranged in a non-uniform manner; at the front and rear edges of the wing, the size of the small wings and the windward attack angle are larger; on the middle parts of the H-shaped fins, the size of the small wings and the attack angle are smaller; by using the device, the heat exchange surface in different flow states can be enhanced respectively, the heat exchange of the fins are effectively enhanced, the pressure drop is reduced, and the deposition of dust particles in the flue gas on the heat exchange surface is reduced, so that the heat exchanger can operate efficiently for a long time in the dusty flue gas.

The invention discloses fire-resistant domestic ceramics, which are manufactured from the following raw materials, by weight part, 13-15 of gypsum, 5-7 of calcium oxide, 13-15 of alumina magnesia spinel, 16-20 of sericite, 6-9 of aluminium powder, 5-7 of silica sol, 7-9 of activated carbon, 1-2 of propenyl alcohol, 40-45 of coal ash, 35-40 of white glaze spheres, 6-8 of waste glass, 10-14 of maifan stone, 21-25 of green tea, 14-17 of orange peels, 6-8 of shell powder, 4-6 of shrimp shell powder, 0.2-0.3 of polyvinyl alcohol, 0.2-0.3 of tributyl phosphate, and a proper amount of deionized water. The fire-resistant domestic ceramics are high in strength, have certain shock resistance, are good in particle adhesion, and thus, the problem that conventional ceramics are damaged and prone to crack is overcome. The fire-resistant domestic ceramics are worthy of promotion.

The invention discloses a solvent-free film-coating controlled-release fertilizer and a preparation method thereof. The film-coating controlled-release fertilizer comprises fertilizer particles and a coating layer coating the fertilizer particles; the mass percentage content of the fertilizer particles is 93%-97%, and the mass percentage content of the coating layer is 3%-7%; the coating layer is obtained by polymerization of polyisocyanate, polyester polyol and microcrystalline paraffin. According to the preparation method provided by the invention, 2 kinds of polymers are respectively sprayed on the particle surface one after another, the problem that coating is interrupted due to blocking caused because one pipeline and one nozzle are each used in common is solved, at the same time, the probability of particle adhesion occurring in a device is significantly reduced, and thus the stability of the film coating process is obviously enhanced. The problem that the film coating speed and the film coating uniformity cannot be taken into account is solved, and uniform distribution of a film layer during a rapid film forming process is achieved.

The present invention provides a system capable of automatically making a diagnosis of a semiconductor device manufacturing apparatus, based on a result of particle detection on a substrate such as a semiconductor wafer. In one preferred embodiment, the surface of the wafer is divided into square-shaped minute areas of 0.1 mm to 0.5 mm, and existence of particles in each minute area is inspected. Based on the inspection result, data, in which existence of particles in each minute area is correlated with the address thereof, is created. The surface of the wafer is divided into several tens to several hundreds of evaluation areas. A binarized data is assigned to each evaluation area, and is determined based on the fact that the number of the minute areas in which particles are detected included in the evaluation area is larger, or not larger than a predetermined reference value. A correspondence table, showing the relationship between binarized data arrangements and the causes of particle adhesion, which is made based on empirical rules or experimental results, is prepared. By applying the binarized data made based on the inspection result to the correspondence table, the cause of particle adhesion can be identified.

The invention relates to a makeup composition, an application thereof and a makeup essence thereof. The makeup composition is prepared from the following active components in parts by weight: 10-60 parts of bio-saccharide gum-4, 1-20 parts of inonotus obliquus plant peptide and 1-10 parts of oat polypeptide, wherein the bio-saccharide gum-4 forms a physical barrier membrane on the surface of skin to prevent dust or fine particle adhesion, so that generation of free radicals on the surface of the skin can be reduced; the inonotus obliquus plant peptide is beneficial to the control of excessive secretion of skin grease and adjustment of the balance of skin water-oil secretion, so that the adhesion of fine particles to the skin is further reduced, and the generation of the free radicals on the skin can be reduced; the oat polypeptide can eliminate free radicals on the skin generated by dust, fine particles and UV (Ultraviolet) radiation and avoid collagen in the skin from being decomposed and natural anti-oxidant from being consumed. The active components have synergistic protection actions on the skin, and play roles in resisting exogenous environmental harm through multiple protections on the skin.

The present invention pertains to an electrolytic copper plating method characterized in employing a phosphorous copper anode having a crystal grain size of 1500 μm (or more) to 20000 μm in an electrolytic copper plating method employing a phosphorous copper anode. Upon performing electrolytic copper plating, an object is to provide an electrolytic copper plating method of a semiconductor wafer for preventing the adhesion of particles, which arise at the anode side in the plating bath, to the plating object such as a semiconductor wafer, a phosphorous copper anode for electrolytic copper plating, and a semiconductor wafer having low particle adhesion plated with such method and anode.

The invention relates to the field of plastic processing, in particular to a plastic granulator and aims to solve the problem of plastic particle adhesion and improve plastic particle size uniformity.The plastic granulator comprises a first mounting plate, a first collecting frame, supporting seats, an air drying frame, a first bearing seat, a first pulley, a first flat belt, a fourth rotating shaft, a third mounting plate and the like. A second mounting plate is fixedly connected to a lateral portion of the first mounting plate, and the air drying frame is fixedly connected to a lateral portion, away from the second mounting plate, of the first mounting plate. The first bearing seat is embedded to a lateral portion of the air drying frame. The plastic granulator has advantages that the plastic particles accumulated after granulation are less prone to adhesion, and the manufactured plastic particles can be screened and classified to guarantee plastic particle uniformity.

The invention relates to the field of food and health-care products and provides a preparation method of salt containing compound components. The preparation method comprises steps as follows: a plant extract and a solvent are mixed and stirred, and a homogeneous dispersion body is prepared; the surface of sieved raw material salt is coated with the dispersion body by an fluidized-bed coating machine, and the salt containing the compound components is prepared; parameters of the fluidized-bed coating machine are set, the negative pressure in the machine ranges from 200 Pa to 500 Pa, the air inflow temperature ranges from 35 DEG C to 85 DEG C, the temperature of the raw material salt ranges from 30 DEG C to 70 DEG C, and the atomizing pressure of a spray gun ranges from 0.1 Mpa to 0.7 Mpa. The uniformity of the particle diameter and the uniformity of the content of plant extract are guaranteed through the fluidized-bed coating machine, besides, the defects of high adhesion performance and poor film forming performance of the plant extract are overcome due to addition of a lubricant and a plasticizer, and the problems of salt particle adhesion, exceeding of particle sizes and probability that salt particles easily fall and become fine powder in the dry storage process are avoided.

The invention discloses a low-temperature-resistant polypropylene clothing packaging film composed of the following components in percentage by weight: 75-92wt% of homo polypropylene, 7.5-22wt% of modified polypropylene and 0.5-3wt% of adhesion preventive, wherein modified polypropylene is composed of a repeating unit of isotactic polypropylene and 6-22% of irregularly-distributed ethylene. The low-temperature-resistant polypropylene clothing packaging film disclosed by the invention is resistant to low temperature, high in transparency and good in anti-blocking property; in addition, the well-chosen non-migration particle adhesion preventive is adopted, and the problems of high friction resistance, opening difficulty and easiness for powder leakage of a single layer of film, caused by the addition of modified polypropylene, are solved.

The invention discloses machine-made sand quality detection equipment and a detection method thereof. The detection equipment comprises a feed port, a water content measurement device, a sample introduction device, a powder content measurement device, a dispersing device, an image collection device, an image analysis device and a recycling device; the water content measurement device comprises drying equipment for drying machine-made sand to prevent particle adhesion from affecting the image collection; and the powder content measurement device comprises a dust collector for removing stone powder from the machine-made sand to prevent the dust from affecting the image collection. The machine-made sand quality detection equipment has the following advantages: the water content measurement device and the powder content measurement device are added to preprocess the machine-made sand prior to the image collection so as to improve the reliability of a picture; and a detection method of granular shape correction granularity is added to correct a granularity detection result so as to eliminate the difference in the detection results of an image method and a sieving method.

The invention discloses a flexible platinized counter electrode, and a preparation method and application thereof. The preparation method for the flexible platinized counter electrode comprises the following steps of: 1) preparing a TiO2 layer on a flexible substrate to obtain the flexible substrate modified by the TiO2 layer; and 2) depositing platinum on the TiO2 layer at room temperature by taking a platinum salt as a precursor, taking an alcohol solvent dissolving the platinum salt as a hole scavenger and using an ultraviolet in-situ reduction method to obtain the flexible platinized counter electrode. The preparation method for the flexible platinized counter electrode is simple and low in cost, and the flexible platinized counter electrode can be prepared at low temperature. The obtained flexible platinized counter electrode has the advantages of low platinum content, high catalytic activity, high repeatability, strong platinum particle adhesion strength, high stability and the like.

The invention discloses a sampling film and a method for detection and analysis of iron ore sintering flue gas ultrafine particles by using the sampling film, wherein the sampling film comprises a polytetrafluoroethylene substrate film and a high-temperature-resistant adhesive tape or conductive tape attached on the surface of the substrate film. The sampling film has the advantages of high temperature resistance, corrosion resistance, strong electrical conductivity, good particle adhesion property and the like, is used in a series of particle trap devices such as an impact type dust particle grading instrument WY, Anderson, LPI, ELPI and the like, and can achieve ultrafine particle high-efficiency trapping and accurate quantification of mass and concentration; and after decomposition, the sampling film can be used for ICP-MS or directly used for SEM-EDS analysis of ultrafine particle morphology characteristics, the contents of major and trace components and other physicochemical characteristics.

The invention discloses a sedimentation device for sewage treatment. The sedimentation device includes a supporting pedestal, a sedimentation chamber, a material guiding pipe, a feeding hopper and discharge pipes; the sedimentation chamber is mounted on the supporting pedestal and has a cylindrical cavity body structure having the bottom tilted to a sewage draining port; the inner wall of the sedimentation chamber is provided with guide plates A in an tilting manner; guide plates B are arranged between the guide plates A and are mounted on the material guiding pipe in an tilting manner; the material guiding pipe is mounted on the feeding hopper; the feeding hopper is mounted at the upper edge opening of the sedimentation chamber; the discharging pipes are mounted below the upper edge opening of the sedimentation chamber; the sedimentation chamber is provided with exhaust ports; the exhaust ports are located above the discharging pipes. A tank body and the material guiding pipe are adopted, and the guide plates A and the guide plates B are respectively mounted on the tank body and the material guiding pipe in the titling manner, so that the sewage flow rate is reduced, the particle adhesion area is increased, the sedimentation time and the drug use amount are reduced, the production cost is lowered, and the production efficiency is improved.

A powder coating booth containment structure including first and second canopy halves, each of which is a substantially nonconductive, seamless, structural composite to substantially reduce oversprayed powder particle adhesion to the booth inner surfaces. The composite canopy halves, when assembled into a spray booth additionally including either a floor or a utility base and one or a pair of end units in the form of aperture bulkheads, vestibules, or a combination of both, are structurally sufficiently strong that no external support frame is required. The composite canopy halves can each include sidewall and ceiling portions, in an embodiment, that can be connected to a floor. In another embodiment, the canopy halves each additionally include a floor portion such that they may be connected together at a floor edge and placed atop a utility base. They may be connected to the utility base. In another embodiment, the canopy halves may each further include an integral end or ends, comprising aperture bulkhead or vestibule-type end portions. Methods of assembling these embodiments are also provided that require less time than for known powder coating spray booth assembly.