40 results about "Particle control" patented technology

The invention provides an annular air supply chamber for particle control in the wafer conveying process, and the chamber comprises an annular air supply cavity, and the inner ring region of the annular air supply cavity is used for placing a wafer; an air inlet; the fan is arranged on the surface of the annular air supply cavity; the first-stage pressure stabilizing cavity is formed in the annular air supply cavity and communicates with the air inlet hole; the second-stage pressure stabilizing cavity is formed in the annular air supply cavity, and interstage gas transmission of the first-stage pressure stabilizing cavity and interstage gas transmission of the second-stage pressure stabilizing cavity are communicated through a micro gap; the air outlet hole is formed in the annular air supply cavity, located on the outer side of the wafer and communicated with the second-stage pressure stabilizing cavity; wherein the first-stage pressure stabilizing cavity is used for carrying out primary speed reduction and primary pressure homogenization on clean gas introduced from the gas inlet hole under the action of high flow resistance of the micro gap, the second-stage pressure stabilizing cavity is used for carrying out secondary speed reduction and secondary pressure homogenization on the clean gas subjected to primary pressure homogenization, and the gas outlet hole is used for spraying out the clean gas subjected to secondary pressure homogenization; and a uniform and stable closed annular air curtain is formed around the wafer.

The application discloses a clean workshop independent decoupling clean air conditioning system and a control method thereof, and belongs to the field of clean air conditioning system. The clean workshop independent decoupling clean air conditioning system comprises a cleanliness control module, a temperature control module and a humidity and positive pressure control module. The cleanliness control module is used for bearing clean air supply and particle control in a clean room. The temperature control module comprises a coil pipe and is used for bearing sensible heat load processing in the clean room. The temperature control module runs in a dry working condition by taking medium-temperature water as refrigerant and inputting the refrigerant into the coil pipe. The surface temperature of the coil pipe is always higher than the dew point temperature of indoor air. The humidity and positive pressure control module is used for bearing fresh air load, latent heat load and positive pressure maintenance in the clean room. The cleanliness control module, the temperature control module and the humidity and positive pressure control module are independently realized by air volume decoupling, load decoupling and control decoupling modes, and cooperatively maintain the cleanliness, temperature, humidity and positive pressure of the clean room environment in a steady state. The application adopts the independent decoupling design, controls the cleanliness and temperature and humidity, has no condensation risk in the dry working condition, is energy-saving and convenient to operate and maintain.

The invention provides a particle control device and method based on a special sound wave sound beam, and the device comprises a micro-channel which comprises a first channel; the particle focusing unit is used for arranging particles in the fluid in the first flow channel in a queue and enabling the particles to pass through the following detection units one by one; the detection unit is used for detecting the particles in the queue so as to identify the first particles included in the queue; and the first special ultrasonic device is tightly attached to the micro-channel and is used for generating a special sound wave beam current with expected intensity when the first special ultrasonic device is started, and the first particles flowing through the first special ultrasonic device are driven to flow to other laminar flow in the first channel or flow to a target channel through the special sound wave beam current. According to the invention, deviation of the moving direction of the target particles can be accurately controlled.

The invention discloses a particle directional and fixed-point transport system and method based on asymmetric astigmatism light field regulation and control, and belongs to the technical field of optical micro-control. The system comprises a laser, a cylindrical lens, a first plano-convex lens, a second plano-convex lens, a first reflector, a second reflector and a microscope objective. The cylindrical lens is controlled in an off-axis mode to enable a light beam to be incident vertically in an off-axis mode, and light intensity deviation perpendicular to the optical tweezer line direction is formed on the focal plane of the cylindrical lens. And converting the offset into light intensity gradient distribution along the optical tweezers line direction by using a reflector group, and generating the asymmetric linear optical tweezers after focusing by a microscope objective. The light field generates a directional net scattering force to drive the particles to move unidirectionally along the optical tweezers line direction while maintaining stable capture of the particles. Active modulation devices such as an acousto-optic deflector and a spatial light modulator are not needed, particle directional transportation can be achieved only through cooperative regulation and control of optical elements, and the device has the advantages of being simple in structure, low in cost and high in light field stability and is suitable for biomedical microoperation and particle control in a micro-fluidic chip.

The application discloses a photoelectric tweezers device capable of patterning and controlling micro particles, relates to the technical field of micro particle control, and comprises a patterned light beam generating light path, an ultraviolet sheet-shaped illumination module and a photovoltaic wafer control platform. The patterned light beam generating light path generates a preset pattern light beam, and the preset pattern light beam generates a first electric field on the photovoltaic wafer control platform. The ultraviolet sheet-shaped illumination module generates a second laser, and the second laser is expanded, and the intensity and diameter of the expanded second laser are controlled, so that a second electric field is generated on the photovoltaic wafer control platform. Micro particles in the photovoltaic wafer control platform move to a preset pattern area under the influence of the first electric field and the second electric field. The application captures micro particles by using patterned laser, so that the number of controlled particles is increased and the capturing efficiency is improved.

The invention discloses a polishing pad particle control device and method for polishing a high-precision mask substrate, and belongs to the technical field of semiconductor manufacturing and optical element precision machining. The device comprises a mounting bracket, a flexible ramming head assembly, a multi-degree-of-freedom driving mechanism, a detection module and a gas path system, the flexible ramming head assembly is combined with a replaceable functional head through an air bag type flexible ramming head mounting seat and is matched with an air path system to realize self-adaptive pressure fitting and flexible contact; the multi-degree-of-freedom driving mechanism drives the ramming head to rotate and swing in a combined mode, and the detection module monitors the distance in real time. According to the invention, the functions of cleaning, shaping and particle control are integrated, so that efficient cleaning, precise shaping and thorough particle removal of the polishing pad are realized, rigid contact damage and secondary pollution are effectively avoided, and the polishing processing quality and process stability of the high-precision mask substrate are improved.

The application relates to an acceleration measuring device based on a particle image velocimetry, which comprises at least two CCD cameras, the center points of the mirrors of the two CCD cameras are located on a straight line through a limiting device; a tracer particle generator is used for emitting tracer particles along the direction vertical to the normal of the mirror of the CCD camera; a four-pulse laser is used for sequentially emitting four pulse laser beams along the direction vertical to the direction of the particle flow to illuminate the tracer particles; a control device is connected with the CCD camera and the four-pulse laser respectively, and is used for synchronously controlling the CCD camera and the four-pulse laser, so that the CCD camera acquires the tracer particle images under the irradiation of different pulse lasers in a double-exposure mode, and the speed and acceleration of the particles are acquired based on the tracer particle images. Since the four-pulse laser capable of sending four high-energy pulse lasers at a time is adopted, at least four particle images with a very short time interval are acquired by using two CCD cameras, and then the particle acceleration can be acquired.

The present application relates to air pollution particle control technical field, especially to a kind of dehumidification dust removal device and dehumidification dust removal method.The device includes filter cartridge and louvre flow guide device arranged annularly around the filter cartridge by inside and outside sequentially, the top of the filter cartridge is provided with clean gas outlet, the components of the louvre flow guide device include hoop beam and flow guide vane, wherein the flow guide vane is arranged around the filter cartridge, and the upper and lower ends of the flow guide vane are limited as cylindrical by the hoop beam, and there is gap between adjacent two flow guide vanes;Hook-shaped water collecting tank is located between the filter cartridge and the louvre flow guide device, and the inner wall of the hook-shaped water collecting tank is hydrophilic coating, for trapping moisture in the moisture and dust-containing gas.The dehumidification dust removal device of the present application can effectively dehumidify and remove dust, and the dehumidification rate reaches more than 50%, and the dust removal rate reaches more than 99%.

The invention provides a particle program optimization method based on a Shenwei architecture. The method comprises the following steps: analyzing program hotspots, finding and calculating a hotspot function, and optimizing the function by using five means of particle control, step number parameter control, data classification transmission, function expansion and function inline by utilizing the advantages of an SW26010pro architecture; the execution efficiency of the particle program is improved, the computing performance of the Shenwei architecture is fully played, and rapid and effective operation of the large-scale particle computing program is achieved.

This invention discloses a hydraulically driven chiseling alloy array cutter head and a coke oven slag cleaning robot, belonging to the field of coke oven slag cleaning technology. It solves the problems of existing rotary cutter heads being unable to adjust their extension length in real time, which easily leads to cutter head jamming / chipping, excessive instantaneous back pressure in the hydraulic system, or incomplete cleaning when cleaning coke slag with sudden changes in thickness. The invention includes a chiseling cutter head mounting base, a hydraulic drive motor, a motor reduction mechanism, a chiseling linkage component, and a chiseling alloy array cutter head. In this invention, the chiseling alloy array cutter head, combined with the cutter head pitch adjustment unit, obtains feedback parameters from the pressure sensor on the hydraulic drive motor side in real time. It can automatically adjust the working depth and extension position of the chiseling alloy array cutter head based on dynamic load changes. This not only improves the uniformity of coal slag crushing and the fine particle control accuracy, but also fundamentally solves the problems of jamming, chipping, system impact, and cleaning blind spots caused by the inability of traditional fixed cutter heads to self-adjust.

The invention relates to the technical field of particle control equipment, and discloses a uniform mixing and uniform distribution control device for coiled material particle spreading, which comprises a material box for feeding particle materials; a base; the regulation and control mechanism is used for regulating and controlling the particle materials in the material box; and the regulation and control mechanism comprises a uniform control device, a width control device and a material control device. According to the uniform mixing and uniform distribution control device for spreading the coiled material particles, the uniform distribution roller composed of the two half rollers (the first half roller and the second half roller) rotating oppositely is arranged, particle materials are automatically distributed in the left direction and the right direction to be thrown in the falling process, the distribution uniformity of the particle materials on the surface of a coiled material is effectively improved, and the uniformity of the particle materials is improved. And threaded sleeves in the width control device are matched with opening limiting frames, and the two threaded sleeves adopt opposite thread screwing directions, so that the two opening limiting frames can move relatively, the width of the discharging opening is adjusted, and the requirements of coiled materials with different widths or different sowing densities are met.

The invention relates to dynamic adjustable optical tweezers based on a polarization-sensitive transverse bifocal superlens, and belongs to the field of optical tweezers technology and micro-nano optics. According to the super-lens, dynamic regulation and control of a focus are realized by using sensitive response of the silicon nano-column array to polarization through a composite propagation phase and a geometric phase. Under linear polarization or elliptically polarized light, the system can generate transversely symmetrical double focuses; under the circularly polarized light, a single-side focus is formed. By adjusting the polarization state of incident light, a double-particle capture mode, a single-particle capture mode and a particle transverse transport mode can be flexibly switched. According to the invention, the physical structure does not need to be changed, the dynamic control can be realized only by external optical regulation and control, the structure is compact, the integration degree is high, the control is flexible and the like, and a new technical approach is provided for an on-chip particle control system.

The present application provides a health care product high-speed particle counting intelligent control method based on DSP and linear array CCD, comprising the following steps: S1: health care product particle multi-dimensional feature self-adaptive calibration and reference feature library construction; S2: linear array CCD multi-channel synchronous acquisition and DSP pre-filtering processing; S3: frame-by-frame point feature matching based on sparse representation classification algorithm and dynamic counting initial value generation; S4: device parameter-motion feature adaptability analysis and deviation quantification based on cloud model correlation analysis algorithm; S5: double deviation fusion based on variable weight combination weighting-evidence theory fusion algorithm and adaptive particle control adjustment parameter calculation; S6: particle counting machine actuator closed-loop regulation and linear array CCD real-time verification; S7: DSP counting result calibration and adjustment parameter self-learning update. The present application realizes the collaborative optimization of particle recognition counting and device parameter adjustment, and improves the adaptive adjustment capability and intelligent control precision of the particle counting device.

Controlling robots for manufacturing objects using magnetic particles includes obtaining of a first set of object parameters associated with at least a first shape of a first physical object. Based on the first set of object parameters, first control data is generated for each robot of a first set of robots. Based on the first control data, the first set of robots is controlled to generate a first physical arrangement of the first set of robots in a second shape similar to the first shape. A magnetic field of each robot of the first set of robots is adjusted to generate a first layer of magnetic particles on the first physical arrangement. A supply of a first amount of heat around at least one portion of the first layer of magnetic particles is controlled to generate a second physical object similar to the first physical object.

The invention discloses a water turbine anti-wear design method and system for controlling sand flow separation through multiphase flow simulation, and belongs to the field of hydraulic machinery design and anti-wear. The method comprises the steps that a parameterized geometric model and a water-sand physical property parameter library are established, computational domain grids are divided, boundary conditions are set, a water-sand multiphase flow control equation is established and solved, and the water-sand multiphase flow control equation is obtained. A wear model is implanted to calculate wall surface wear distribution, a sand grain track and a flow field structure are analyzed to identify a wear mechanism, wear-resistant optimization design is carried out based on a sand grain control concept, and design iteration and effect evaluation are carried out. The method can accurately predict the wear distribution of the flow passage component of the water turbine, reduces the wear of a key area by actively guiding a sand flow path, improves the wear resistance and service life of the water turbine, reduces the sand wear from the source, remarkably prolongs the operation cycle of the water turbine while guaranteeing the hydraulic efficiency of the water turbine, and improves the working efficiency of the water turbine. And the method has important engineering practical value and popularization prospect.

A high-performance valve with a composite throttling structure includes a valve body, a valve seat, and a valve core. The valve core has a flow channel in its center and a groove on its surface. The key feature is that both the outer and inner surfaces of the valve core are provided with throttling units. This invention enables a unique valve structure that achieves extremely low flow resistance at large openings and extremely high flow resistance at small openings. It achieves excellent flow control characteristics and resistance to erosion and cavitation across the entire opening range. This high-performance multi-stage throttling valve with strong particle control extends the valve's controllable range and performance to a wider extent.

The invention discloses a fine-scale droplet and particle collision high-speed microscopic test device and method, and the device comprises a vibration isolation platform pedestal, and the top of the vibration isolation platform pedestal is provided with a closed glass body cover; the collision generation system comprises a displacement control unit, a fine-scale liquid drop generation unit and a particle control unit, the displacement control unit is installed on the shock isolation platform base, and the fine-scale liquid drop generation unit and the particle control unit are installed on the displacement control unit; the calibration system is mounted on the closed glass body cover; the high-speed microscopic test system is mounted on the shock insulation platform base; and the data processing and analyzing system is connected with the high-speed microscopic testing system. According to the high-speed microscopic testing system, the microscopic morphology observation precision in the fine-scale dust collision process is well improved, and the collision accuracy of liquid drops and particles is remarkably improved through the heavy hammer-assisted laser calibration system.

The invention provides a GIS particle dynamic tracking method based on singular constraint manifold and multi-physics field coupling, and relates to the technical field of state monitoring and fault diagnosis of high-voltage electrical equipment. The method comprises the following steps: firstly, carrying out physical parameter offline calibration, and calibrating a collision recovery coefficient e and a vibration attenuation coefficient zeta; the method comprises the following steps: constructing a singular constraint matrix K representing intrinsic physical constraints on the basis of a geometric topological structure of a GIS true experiment cavity, space coordinates of a multi-modal heterogeneous fidelity sensor array and offline calibrated physical parameters; then, an acoustic-magnetic composite particle control unit is utilized, particles are driven in a GIS true experiment cavity, a multi-mode heterogeneous fidelity sensor array collects signals caused by particle movement in real time, a positioning algorithm based on singular constraint manifold fusion is designed, the particle positioning problem is converted into a positioning optimization problem, the positioning optimization problem is solved, and a positioning result is obtained. And obtaining a three-dimensional motion trail of the particles.

The invention provides an on-chip angular momentum detection method based on a slit ring structure. SAM and OAM can be distinguished at the same time. When backside illumination is carried out, etching slits in the ring can generate surface plasmon polaritons (SPP) waves, and interference patterns related to SAM and OAM are formed in the center. Different interference modes can directly identify SAM and OAM through single measurement. The proposed on-chip detector is easy to manufacture and can be extended for broadband applications. Based on the technical scheme, the angular momentum of the terahertz vortex light can be conveniently detected, a novel method for detecting the angular momentum of the vortex light is provided for the fields of free space optical communication and particle control, and the method has high application value.

The invention discloses a gas turbine key component data visualization method and device, and relates to the technical field of data-driven three-dimensional visualization models.The method comprises the steps that on the basis of basic data, FLUENT fluid simulation software is used for conducting analog simulation on flowing fluid in a key component area, and a vector field file is generated; in a Niagara particle system of a vector field file unreal engine, particle control data is determined by utilizing a speed intensity control equation according to the positions and detection data of a plurality of key points in key components, and particle state control is completed; and performing visual rendering on the particles in the key component area, and dynamically adjusting the virtual display effect of the key component area. According to the method, the flowing fluid in the key component area is simulated, so that the data visualization of the key component of the gas turbine is realized, and the actual state change in the key component is intuitively and accurately displayed.

The invention provides a flow cell sorter, a method and a sound wave particle control micro-channel chip, and relates to the field of flow sorting, a liquid flow system of the flow cell sorter comprises a sound wave particle spacing adjusting unit, the sound wave particle spacing adjusting unit is configured to generate a sound standing wave field in a sample flow channel, the pitch line or the pitch surface of the sound standing wave field is perpendicular to the liquid flow direction, so that the particles move towards the pitch line or the pitch surface under the action of sound radiation force, and the particles are arranged at preset intervals in the liquid flow direction. According to the invention, under the action of the specially designed micro-channel and the piezoelectric acoustic wave device, the spacing of particles in a sample flow is adjusted, so that the particles are uniformly distributed, the probability that the particles are wrapped by the same liquid drop is reduced, and the sorting yield is improved; the particles are focused to the position of a sound wave nodal line in advance by adopting a sound wave focusing technology before sheath fluid focusing, and the width of the sound wave nodal line is relatively small, so that the consistency of the positions of the sample particles and the consistency of the flow velocity at a high sample flow velocity can be ensured, and the sorting purity and the yield are improved.

An ion source for an ion implantation system is configured to form an ion beam from a predetermined species along a beamline, where the ion beam is at an initial energy. A deceleration component is configured to decelerate the ion beam to a final energy that is less than the initial energy. A workpiece support is configured to support a workpiece along a workpiece plane downstream of the deceleration component along the beamline. A beamline component is positioned downstream of the deceleration component along the beamline. The beamline component has a feature that is at least partially impinged by the ion beam, and where the feature has a surface having a predetermined angle of incidence with respect to the ion beam. The predetermined angle of incidence provides a predetermined sputter yield of the ion beam at the final energy that mitigates deposition of the ion species on the beamline component.

The embodiment of the specification provides a multi-modal adaptive predictive control system of a wafer conveying mechanical arm, high precision and high reliability of the whole process of wafer conveying are realized through integration of multi-modal perception, digital twin simulation and adaptive control. In the system initialization stage, the digital model is established through automatic calibration to provide an accurate benchmark for subsequent operation; the digital twin simulation predicts vibration and interference in advance, generates an optimized trajectory and a feedforward control amount, and effectively avoids operation risks; real-time adaptive motion fuses multi-source feedback and feedforward compensation to ensure trajectory tracking accuracy and actively suppress vibration; end alignment and compliant control avoid wafer damage and particle generation; health monitoring and particle control optimize motion parameters in real time to reduce pollution sources; a learning optimization mechanism continuously improves the system through data comparison and model correction, and finally improves production efficiency and product yield.

The invention discloses an eyedrop production control system and method, and relates to the technical field of eyedrop production. The system sequentially comprises a pre-needle terminal physical and chemical calibration ring (comprising a micro-mixing shell and a static mixing element array), an EHD nozzle head (a nozzle head shell, a nozzle core, an electrode ring, an ultrasonic transduction ring, an annular negative pressure cavity and a tail end particle catching grating) and an online final inspection and self-adaptive sealing unit along material flow, and is linked by a controller. According to the method, single-bottle filling is divided into a nucleation region, a necking region and a tail breakage region, inter-bottle differential vectors are formed based on the volume, the liquid level, the spectrum and the drop shape, the voltage, position, ultrasonic and suction setting of the next bottle is generated through three-domain coupling matrix mapping, non-contact stable drop breakage, foam inhibition and tail end particle control are achieved, the filling precision, the sealing consistency and the release rate are improved, and the product quality is improved. And the energy consumption and the rejection rate are reduced.

An exemplary processing method can include generating a plasma of a cleaning precursor in a remote region of a semiconductor processing chamber. The method can include flowing plasma effluents of the cleaning precursor into a processing region of the semiconductor processing chamber. The method can include contacting a substrate support with the plasma effluents for a first period of time. The method can include lowering the substrate support from a first position to a second position while continuously flowing the plasma effluents of the cleaning precursor. The method can include cleaning the processing region of the semiconductor processing chamber for a second period of time.

The application provides a particle control device, a sorting device and a method based on a special acoustic wave beam flow, wherein the sorting device comprises: a micro flow channel, comprising: a first flow channel, a second flow channel and a third flow channel in communication downstream of the first flow channel; a particle focusing unit for arranging particles in a fluid in the first flow channel in a queue and making the particles pass through a detection unit one by one; the detection unit is used for detecting the particles in the queue, so as to identify the first particles included in the queue; a first special ultrasonic device is arranged close to the micro flow channel, and is used for generating a special acoustic wave beam flow with a desired intensity when the device is started, driving the first particles flowing through the device to flow to the second flow channel through the special acoustic wave beam flow, and making the particles flowing through the device flow to the third flow channel when the device is not started. The application can accurately control the deviation of the moving direction of the target particles for sorting.

The invention provides a spreading liquid crystal device for long-range directional control of particles and a control method. The spreading liquid crystal device comprises a spreading liquid crystal chip, a state transition module, a pre-driving module, a detection module, a particle control module and a connection module, the motion state of the particles can be controlled by preparing uniformly distributed particles, a surfactant and a nematic liquid crystal mixture, pouring the mixture into the expanded liquid crystal chip, applying a state transition electric signal Sa, applying a pre-driving electric signal Sb, mechanically shaking and applying and regulating a particle control composite electric signal Sc. According to the spreading liquid crystal device and the particle long-range directional control method, long-range transportation and directional transportation of particles in a liquid crystal medium under the control of electric signals are achieved.

A substrate processing method according to an aspect of the present disclosure uses a substrate processing apparatus including a process chamber, a substrate support portion, a gas spray portion and an RF power supply, and comprises: a step of seating a substrate on the substrate support portion in the process chamber, and chucking the substrate on the substrate support portion by applying an electrostatic voltage to an electrostatic electrode; a step of supplying process gas to a reaction space so as to form a thin film on the substrate chucked on the substrate support portion; a step of dechucking the substrate from the substrate support portion and unloading the substrate from the process chamber; and a particle control step of reducing particles in the process chamber by alternately applying control voltages of different polarities to the electrostatic electrode at least once in a state in which the substrate is unloaded from the process chamber.

To provide a mounting method capable of easily managing particles without greatly changing a mounting process from a cutting process to a bonding process.SOLUTION: A preparing step S1 of preparing a laminated body 10 in which the first protection component 12 is laminated as an outermost layer, a dicing step S2 of dicing the laminated body 10 into a chip 14, a first removing step S3 of removing the first protection component 12 from the chip 14, an arranging step S3 of arranging the chip 14 after the first removing step S6 so that the second protection component 13 side faces a bonding head 320, a heating step S7 of heating at least a part of the second protection component 13, a holding step S8 of holding the chip 14 by the bonding head 320 via the heated second protection component 13, and a bonding step S9 of bonding the chip 14 to the base substrate 200 by the bonding head 320.SELECTED DRAWING: Figure 1

The application discloses a particle exhaust system and method for a fusion reactor environment, and relates to the technical field of fusion reactor vacuum and particle control. The system comprises a low-temperature pumping device, an adsorbent pump and an inert gas pumping device. The low-temperature pumping device is arranged near a fusion reactor pumping port, and is used for preferentially reducing the partial pressure of impurity gases such as nitrogen, oxygen, water vapor and carbon-containing gas, thereby reducing the impurities entering the adsorbent pump. The adsorbent pump is used for reducing the partial pressure of hydrogen isotope gas. The inert gas pumping device is used for reducing the partial pressure of helium, and is arranged downstream of the adsorbent pump or is connected with the pumping channel through a parallel branch. The inert gas pumping device is a sputtering ion pump, a molecular pump or a combination thereof. The application realizes the cooperative work of each pumping unit through the hierarchical control of the partial pressure of different gases, thereby improving the stability and reliability of the particle exhaust system under the tritium and neutron environment.