The invention relates to the technical field of precise cleaning and regeneration, and discloses an aluminum
nitride crucible cleaning and regeneration process for a MicroOLED
evaporation source, which comprises the steps of organic soaking, primary pure water soaking, physical film removal,
water washing, primary
drying, high-temperature baking, acid
pickling, secondary pure water soaking, ultrasonic cleaning, secondary
drying, detection,
drying, cooling and vacuum packaging. According to the cleaning and regeneration technology for the aluminum
nitride crucible for the MicroOLED
evaporation source, multiple cleaning
modes are combined,
organic matter on the surface and in the aluminum
nitride crucible can be effectively dissolved, compared with traditional soaking with a single
organic solvent, the removal effect on stubborn stains is better, organic residues and
permeation residues are avoided, and the service life of the aluminum nitride crucible is prolonged. The crucible can be safely mixed for use in subsequent use through the thorough cleaning process, cross
contamination is effectively avoided, product flaws caused by incomplete cleaning of the crucible are reduced, the product yield is further improved, the high product yield means lower production cost and higher market competitiveness, and remarkable
economic benefits are brought to enterprises.