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Composite getter for maintaining medium and low vacuum environment and preparation method thereof

A getter and low-vacuum technology, applied in the direction of mixed gas absorption, chemical instruments and methods, electrical components, etc., can solve the problems of negative impact of vacuum degree, small effective area, complex process, etc., achieve high production efficiency and increase investment , The effect of simple process

Active Publication Date: 2011-10-05
FUJIAN SUPERTECH ADVANCED MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this getter device is that the metal container blocks most of the external area of ​​the getter device, the effective area is small and the cost is increased, and the process is relatively complicated
The getter of the getter device is an uncompressed powder mixture. The gas adsorbed in the getter device exposed to the air is difficult to extract during the packaging process of the VIP, and there is a long time after the VIP is sealed. The degassing process has a great negative impact on the vacuum inside the VIP

Method used

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  • Composite getter for maintaining medium and low vacuum environment and preparation method thereof
  • Composite getter for maintaining medium and low vacuum environment and preparation method thereof
  • Composite getter for maintaining medium and low vacuum environment and preparation method thereof

Examples

Experimental program
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Effect test

preparation example Construction

[0044] Preparation of getter metal elemental materials:

[0045] Heat the iron powder with a particle size within the range of 10-200 microns in a hydrogen furnace, and keep it for 120 minutes when the furnace temperature reaches 500°C, or keep it for 90 minutes when the furnace temperature reaches 600°C, or when the furnace temperature reaches 700°C Insulate for 45 minutes, take out the vacuum package after cooling with the furnace, and obtain the iron powder of the scale required by the present invention through reduction treatment, and put the iron powder into a glove box with an argon atmosphere for use.

[0046] Heat the copper powder with a particle size within the range of 10-200 microns in a hydrogen furnace, and keep it for 120 minutes when the furnace temperature reaches 450°C, or keep it for 90 minutes when the furnace temperature reaches 600°C, or when the furnace temperature reaches 700°C Insulate for 60 minutes, take out the vacuum package after cooling, and prom...

Embodiment 1

[0063] The first composite getter of the present invention was prepared. The desiccant powder is selected from the calcium oxide powder prepared by the aforementioned method, and the calcium oxide powder is selected from a particle size of 100-200 microns, because the desiccant powder used in the rotary corer needs coarser particles to increase its flow. properties; the getter metal elemental powder is selected from the iron powder that has been reduced by the aforementioned method, and the iron powder is selected from a particle size of 10-38 microns; the getter alloy powder is selected from the strontium-lithium alloy powder prepared by the aforementioned method, and the strontium-lithium The alloy powder is selected to have a particle size of 50-75 microns.

[0064] In the glove box of the argon environment with the water and oxygen content less than 1ppm, use a tablet press at 25kg / cm 2 The above-mentioned strontium-lithium alloy powder with a weight of 0.5 grams is compr...

Embodiment 2

[0075] Prepare the second composite getter of the present invention. The desiccant powder is selected from the calcium oxide powder prepared by the aforementioned method, and the calcium oxide powder is selected from a particle size of 20-75 microns; 10-38 microns; the getter alloy powder is selected from the barium-lithium alloy powder with a mass percentage of 83.18% barium obtained by the aforementioned method, and the getter alloy powder has a particle size of 75-120 microns.

[0076] In a glove box in an argon environment with water and oxygen content less than 1ppm, the composite getter core-coated structure is pressed with a tablet press. Put the above-mentioned calcium oxide powder with a weight of 3 grams into a mold with a diameter of 30 mm in the tablet machine, get 1 gram of the above-mentioned reduced iron powder and add it to the middle position on the calcium oxide powder in the mold, and then add 0.5 grams of the calcium oxide powder. The above-mentioned bariu...

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Abstract

A composite getter for maintaining medium and low vacuum environment and a preparation method thereof. According to the composite getter, gettering metal element powder and gettering alloy powder are disposed as two layers in an intermediate position of desiccant powder to form a core-spun structure body; the core-spun structure body is sealed in a plastic film; the gettering metal element powderis one of or a combination of at least two of iron powder, nickle powder, copper powder which are processed by reduction and have a particle size of 10-200 micrometers; the gettering alloy powder is one of or a combination of at least two of strontium lithium alloy powder, barium lithium alloy powder, barium magnesium alloy powder with a particle size of 50-500 micrometers; the desiccant powder is one of or a combination of at least two of calcium oxide powder, strontium oxide powder, barium oxide powder with a particle size of 20-200 micrometers; the plastic film can break by itself under the pressure difference of one atmospheric pressure. The service performance is not affected by temporary exposure in air.

Description

technical field [0001] The invention relates to a getter capable of effectively adsorbing gas molecules and water vapor without high-temperature activation and a preparation method thereof. Background technique [0002] The getter mainly uses adsorption to absorb the residual gas retained by the vacuum device during or after mechanical exhaust. Increase and maintain the vacuum within the device. In order to ensure a good vacuum state in the vacuum device, prolong the service life and improve the reliability. Traditional getters need to be evaporated or activated above 400°C to achieve the purpose of getting inhaled. With the development of science and technology, for medium and low vacuum environments between 0.01Pa-100Pa, some vacuum devices containing plastics and other materials that are not allowed to be heated have appeared. If the traditional getter is used in the device, the traditional getter cannot be activated by heating to achieve the purpose of gettering. [...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J20/02B01J20/30
CPCB01J20/04H01L2924/0002B01J20/3289H01J11/52H01J2211/52B01J20/0225B01J20/041H01L23/26B01J20/0237B01J20/0229B01J2220/42B01J20/02B01J20/28004
Inventor 邸小波谢振刚洪国莹
Owner FUJIAN SUPERTECH ADVANCED MATERIAL
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