Unlock instant, AI-driven research and patent intelligence for your innovation.

Heat treatment device

A technology of heat treatment device and heater, applied in the direction of waste heat treatment, post-treatment, post-processing details, etc., can solve problems such as difficulty and complex structure, and achieve the effect of simple structure

Active Publication Date: 2016-03-30
KOYO THERMO SYST CO LTD
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] On the other hand, it is not easy to determine the most suitable ventilation rate corresponding to the amount of workpieces loaded into the furnace body.
For example, if you want to accurately grasp the number of workpieces inside the furnace body and use it to determine the most suitable air exchange rate, in the case of a heat treatment device with a multi-layered workpiece support part, it is necessary to configure a device for detecting the presence of each layer. Sensors without workpieces, etc., resulting in a complex structure

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Heat treatment device
  • Heat treatment device
  • Heat treatment device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0035] The basic structure of the heat processing apparatus 10 which concerns on embodiment of this invention is demonstrated using FIG.1(A) and FIG.1(B). The heat treatment device 10 heats the flat workpiece 18 carried into the furnace body 12 by circulating hot air. In this embodiment, the heat treatment apparatus 10 is used to perform the color filter manufacturing process, but the scope of application of the present invention is not limited to the color filter manufacturing process.

[0036] A plurality of frame members 28 are provided inside the furnace body 12 to support the workpiece 18 in multiple layers. In this embodiment, the workpiece 18 is a rectangular glass substrate, but the type of workpiece 18 to be processed by the heat treatment apparatus 10 is not limited thereto.

[0037] A door 26 is provided on the front of the furnace body 12, and the door 26 is opened or closed when the workpiece 18 is carried in and out. The door 26 is composed of a plurality of sh...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a thermal processing apparatus 10 including a heater 20, a referential load factor calculation portion (CPU (50)), a ventilation amount adjusting portion 16 and a ventilation amount control portion (CPU (50)). The heater 20 is arranged in a furnace body 12 to heat a workpiece 18. The referential load factor calculation portion (CPU (50)) computes the referential load factor of the heater 20. The ventilation amount adjusting portion 16 adjusts the ventilation amount of a ventilation system 11. The ventilation amount control portion (CPU (50)) controls the ventilation amount adjusting portion 16 based on the result obtained by the referential load factor calculation portion (CPU (50)). And, the ventilation amount control portion (CPU (50)) increases the ventilation amount when the referential load factor of the heater 20 increases and reduces the ventilation amount when the referential load factor of the heater 20 decreases.

Description

technical field [0001] The present invention relates to a heat treatment apparatus having a ventilation system for ventilating the inside of a furnace when heat-treating a workpiece disposed inside the furnace. Background technique [0002] In a heat treatment apparatus that heat-treats workpieces such as glass substrates for liquid crystals in the color filter manufacturing process, etc., when the substrate is heat-treated, sublimable components (such as those contained in photoresists) that are coated on the substrate Sublimation components) are vaporized, and the cleanliness of the inside of the furnace decreases due to the sublimation. [0003] Therefore, in the conventional heat treatment apparatus, in order to suppress the concentration of the sublimate in the furnace body below a predetermined value, a ventilation system is introduced, and the ventilation system uses pipes or the like to transfer the air inside the furnace body containing the sublimate from the inside...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/324C30B33/02H01L21/66
CPCF26B5/16F27D7/00F27D17/00F27D19/00F27D21/00
Inventor 向井正行
Owner KOYO THERMO SYST CO LTD