Capacitive micro machinery gyroscope

A technology of capacitive micromachines and gyroscopes, which is applied in the field of microelectromechanical systems, can solve problems such as difficult to achieve, small change in resonant frequency of resonators, high sensitivity, etc., and achieve the effect of increasing sensitivity and increasing capacitance change

Inactive Publication Date: 2011-10-19
NANTONG HUAXING OIL EQUIP +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in practical applications, the Coriolis force generated by the micromechanical gyroscope is extremely small, and the change in the resonant frequency of the resonator caused by it is also extremely small, so it is difficult to achieve high sensitivity

Method used

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  • Capacitive micro machinery gyroscope
  • Capacitive micro machinery gyroscope

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Embodiment Construction

[0014] Specific embodiments of the present invention: as figure 1 As shown, the technical solution adopted in the present invention is: a capacitive micromechanical gyroscope, comprising a mass block 15; defining the center of the mass block 15 as the origin, the direction parallel to one side of the mass block is the X direction, and the direction parallel to the other side is In the Y direction, the capacitive micromechanical gyroscope is symmetrical about the Y axis in the X direction, and symmetrical about the X axis in the Y axis direction;

[0015] The mass block 15 is connected to the driving frame beam 5 through the folding beam II13 connected to its Y-direction side, and the driving frame beam 5 is connected to the anchor point through the folding beam I7; the part fixed on the driving frame beam 5 drives the dynamic comb The teeth and the driving static comb teeth fixed on the driving electrode 3 form a driving comb tooth pair 4, so that the driving frame beam 5 driv...

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Abstract

The invention discloses a capacitive micro machinery gyroscope, belonging to the technical field of a micro electrical mechanical system. A gyroscope mass block 15 is connected with the center of a lever 12; two pivot points are symmetrically distributed between the center and two end points of the lever 12, and the distance h0 from the pivot points to the center of the lever is less than the distance h1 from the pivot point to the end points of the lever; simultaneously two end points of the lever 12 are respectively and sequentially connected with a sensitive transmission beam 8 in Y direction and two sensitive bent beams 9 in X direction; the other end of each sensitive bent beam 9 of two is respectively connected with two end points of a non-deformed beam 16; a moving comb tooth and astatic comb tooth fixed on the non-deformed beam 16 form a sensitive detection comb tooth pair 10 to complete the capacitance detection at the sensitive direction. According to the invention, the displacement detection and the lever amplification technology in the traditional micro machinery gyroscope are combined, the displacement amplification effect of the mass block at the Y direction by the lever is h1/h0, thus the variation of the detection capacitance is increased, and the flexibility of the micro machinery gyroscope is improved.

Description

[0001] 1. Field [0002] The invention relates to a capacitive micromechanical gyroscope, which belongs to the technical field of microelectromechanical systems. 2. Background technology [0003] Due to its small size, low power consumption, and low cost, micromechanical gyroscopes have broad application prospects in military fields such as inertial navigation and attitude reference. According to the detection method, the micromechanical gyroscope can be divided into capacitive gyroscope, resonant gyroscope, piezoresistive gyroscope, piezoelectric gyroscope, optical gyroscope, etc. Traditional micromechanical gyroscopes are based on the detection of Coriolis force to obtain the input angular velocity. [0004] The capacitance detection method has the advantages of simple structure and high precision, and is widely used in various micro-mechanical sensors. Many micro-mechanical gyroscopes are obtained by measuring the displacement of the sensitive direction perpendicular to th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56
Inventor 常洪龙李小卿焦文龙谢建兵苑伟政
Owner NANTONG HUAXING OIL EQUIP
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