Computer-aided management device, method and system for integrated circuit detection

Abstract

The invention provides an integrated circuit detection-orientated computer auxiliary management device, which is characterized by comprising the following devices: a worktable control device, a tray control device, a light source control device, an image acquisition device and a size measurement device. The worktable control device is used for adjusting an upright position and a level position; the tray control device is used for adjusting levelness of a tray; the light source control device is used for controlling a light source, so that a grey scale value of an area to be measured is located within an allowed fluctuated range for target grey scale values; the image acquisition device is used for amplifying and acquiring images of an object to be observed; and the size measurement device is used for outputting physical dimension information of the images of the object to be observed. The invention further provides a corresponding method and system. According to the invention, a grey scale curve is generated after the images of the object to be observed are acquired, and then a starting position and an ending position of the object to be observed are automatically determined according to the grey scale curve, thus the problem of poor accuracy caused by manually pointing and selecting positions is avoided.

Description

technical field [0001] The invention relates to a detection system oriented to integrated circuits, in particular to a computer-aided management device, method and system oriented to detection of integrated circuits. Background technique [0002] The line width detection device is an optical measuring instrument capable of precise detection. It is mainly designed to detect the width of the upper and lower lines of the inner and outer semi-finished products of the printed circuit board after development and etching (before applying green oil). The special light source irradiates the circuit board under test, after optical amplification, the photoelectric signal is converted by CCD, and the image signal is transmitted to the computer, and the resulting image is displayed on the interface, and then the measurement area is directly selected by the mouse to perform edge detection and return the measurement result . It can be extended and applied to the measurement of IC chip lin...

AI Technical Summary

Problems solved by technology

[0003] However, in the existing line width detection device, it is necessary to manually point out the occurrence position and end position of the image of the detected object, and the accuracy is not high

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