Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle
A fixing device and photoresist technology, applied in the direction of photoplate making process coating equipment, etc., can solve the problems of affecting production capacity, time-consuming and laborious replacement, etc., and achieve the effect of convenient replacement, accurate positioning and firm fixing
Active Publication Date: 2012-07-04
SHENYANG KINGSEMI CO LTD
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Problems solved by technology
[0003] In order to overcome the above-mentioned shortcomings, the present invention provides a photoresist nozzle replacement auxiliary positioning semi-automatic fixing device, which solves the problems of time-consuming and labor-intensive replacement and affects production capacity in the prior art. The fast loading and unloading and safe rotation of square substrates are achieved through the use of rotating centrifugal force.
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[0019] Such as Figure 1-3 As shown, the photoresist nozzle replacement auxiliary positioning semi-automatic fixing device in the semiconductor production of the present invention mainly includes: a bracket fixing system of a photoresist nozzle ( figure 1 ) and a photoresist nozzle system ( figure 2 ), or a photoresist nozzle bracket fixing system and multiple photoresist nozzle systems, the photoresist nozzle system is installed on the photoresist nozzle bracket fixing system.
[0020] Such as figure 1 As shown, the bracket fixing system of the photoresist nozzle is connected by the cylinder bracket 1 and the nozzle bracket 4, the air claw 2 is fixed on the cylinder bracket 1, and a pair of positioning pins are installed on the action part of the air claw 2 Claw 3.
[0021] Such as figure 2 As shown, the photoresist nozzle system is composed of a nozzle body 7, a nozzle 6 fixed on the nozzle body 7, and a guiding and fixing post 5, and the nozzle 6 and the guiding and f...
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The invention relates to the field of semiconductor, and specifically provides an auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle in a semiconducting even glue developing equipment. The device can be used for auxiliary positioning and semi-automatic fixing during manually replacing of a plurality of photoresist nozzles and has advantages of convenient replacing, adaptation to replacing of a plurality of nozzles, accurate positioning and firm fixing. The device comprises a carriage fixing system for photoresist nozzles and a photoresist nozzle system arranged on the carriage fixing system for photoresist nozzles. The carriage fixing system for photoresist nozzles is equipped with a cylinder carriage and a nozzle carriage which are connected with each other; the cylinder carriage has a pneumatic detent fixed thereon, and locating detents are arranged on a motion portion of the pneumatic detent. The photoresist nozzle system is equipped with a nozzle body, a nozzle and a guiding fixing clamp column, wherein the nozzle and the guiding fixing clamp column are parallel and fixed on the nozzle body. According to the invention, problems in prior art, such as time-consuming and labor-consuming replacing and influence to capacity, can be solved.
Description
technical field [0001] The invention relates to the field of semiconductors, in particular to a semi-automatic fixing device for auxiliary positioning of photoresist nozzle replacement in semi-conductive glue development equipment, which is used for auxiliary positioning and semi-automatic fixing when multiple photoresist nozzles are manually replaced, to achieve Easy to replace, suitable for multi-nozzle replacement, accurate positioning, and firm fixation. Background technique [0002] At present, in the back-end packaging of semiconductors, a glue leveling and developing equipment needs to integrate a variety of photoresist nozzle systems in one glue leveling unit, so as to achieve the needs of one machine with multiple functions and reduce costs. However, due to the large number of rubber types and the different sizes of photoresist supply pipelines, manual replacement is required for general nozzle replacement. In many cases, the replacement is time-consuming and labor...
Claims
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IPC IPC(8): G03F7/16
Inventor 王阳
Owner SHENYANG KINGSEMI CO LTD