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Connections for vacuum systems

A technology for connection devices and vacuum equipment, applied in parts of pumping devices for elastic fluids, expansion compensation devices for pipelines, adjustable connections, etc., can solve expensive problems, achieve airtight sealing, and be easy to manufacture And adjustment, cost saving significant effect

Inactive Publication Date: 2011-12-14
东电电子太阳能股份公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This connection proves to be feasible, however very expensive, especially if bellows made of Inconel are used

Method used

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  • Connections for vacuum systems
  • Connections for vacuum systems
  • Connections for vacuum systems

Examples

Experimental program
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Embodiment Construction

[0008] according to figure 1 Known connecting devices of this type have a bellows 1 made of metal, such as corrosion-resistant spring steel, Inconel or aluminium, the end of which, surrounding the opening, is welded to the flange 2 and the other end of which is welded. One end is welded to the ring 3 , and the outer ring 3 is connected to the flange 2 through a threaded connection 4 . Furthermore, the ring part 3 is releasably but gas-tightly connected to the pipe part 6 via a screw connection 5 . The bellows 1 allows the movement of the ring 3 relative to the flange 1 both longitudinally and transversely thereto in a limited manner. The additional mechanical connection via the threaded connection 4 with at least one screw which is surrounded by a compression spring and is relatively tensioned by it is designed in such a way that it does not impair these possibilities.

[0009] according to figure 2 The connecting device 15 according to the invention comprises two flanges ...

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Abstract

A pipe socket (18) surrounded by a flange (11) receives an end portion of a pipe piece (16). In an annular gap situated between them, a main sealing ring (12) of plastic, preferably Teflon, is arranged and an auxiliary seal having, for example, a radial shaft sealing ring (13) is placed against the end of the pipe socket (18). Outside of operating times when the pipe socket (18) and the pipe piece (16) have approximately the same ambient temperature, the pipe piece (16) is movable, i.e. displaceable and inclinable, to a limited degree with respect to the pipe socket (18), while the sealing function is performed above all by the auxiliary seal. In operation, the pipe piece (16) assumes a higher operating temperature and expands with the result that the main sealing ring (12) is pressed against the inside of the pipe socket (18) and takes over the sealing function such that the radial shaft sealing ring (13) is protected from corrosive gases. The pipe piece (16) is also then displaceable with respect to the pipe socket (18).

Description

technical field [0001] The invention relates to a connection device for vacuum equipment. This connection is used when connecting components (such as vacuum chambers, pumps, etc.) by piping. Even if the parts being joined have manufacturing tolerances, are subject to vibrations, and are subject to differential thermal expansion, such joints must be vacuum-tight. Furthermore, it has to withstand corrosive gases, such as those used in particular for cleaning equipment parts. Background technique [0002] Known connecting devices of this type, which are described in further detail below, have bellows made of metal, such as corrosion-resistant spring steel, Inconel or aluminium, which ensure the necessary movability. Such a connection has proven to be feasible, but very expensive, especially if bellows made of Inconel are used. Contents of the invention [0003] The object of the present invention is to provide a connection of this type which is likewise releasable and here...

Claims

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Application Information

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IPC IPC(8): F16L27/02F16L27/10F16L51/00F04D29/60
CPCF16L27/026F04D19/04F16L27/1012F04D29/601F16L51/00F16L27/1017F04D29/083F04D29/60F16L27/02F16L27/10
Inventor P·瓦格纳G-R·P·莫瑙尼
Owner 东电电子太阳能股份公司
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