Apparatus and method for coating a substrate with CVD

A technology for coating substrates and heating conductors, applied in coatings, metal material coating processes, gaseous chemical plating, etc., to achieve the effects of long life, durable devices, and increased life

Active Publication Date: 2011-12-21
DIACCON +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Although a relatively thick heating conductor with a diameter of about 2 mm can be considered in order to eliminate the above disadvantages, there are also disadvantages to using such a relatively thick heating conductor.

Method used

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  • Apparatus and method for coating a substrate with CVD
  • Apparatus and method for coating a substrate with CVD
  • Apparatus and method for coating a substrate with CVD

Examples

Experimental program
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Embodiment Construction

[0036] figure 1 A schematic diagram of the first device is shown. A plurality of heating conductors 2 are mounted consecutively in the row direction on the first electrode 1 , preferably at approximately the same distance from one another. The heating conductor 2 is held by being clamped in a holding element 3 arranged on the first electrode 1 . The heating conductors 2 are each held taut by means of tensile elements 4 arranged at their ends. Each tensile element 4 has a swivel arm 5 which is rotatable about a horizontal axis H. As shown in FIG. One end of the heating conductor 2 is mounted on the first end E1 of the respective tensile element 4 . The lever arm 6 extends from the second end E2 in a direction away from the first electrode 1 . The swivel arm 5 and the lever arm 6 , which is firmly connected to the swivel arm 5 , for example by welding, form a sharp angle preferably in the range of 20 to 60°. The gravity of the lever arm 6 exerts a tilting moment on the rota...

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PUM

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Abstract

The invention relates to a device for coating a substrate (14) using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array comprising a plurality of elongated heat conductors (2) is provided in a housing (10), said heat conductors extending between a first (1) and a second electrode (8), wherein the heat conductors (2) are held individually tensioned by a tensioning device attached to one end thereof. For the purposes of improving the life of the heat conductors (2), the invention proposes that the tensioning device comprises a tilt arm (5) having a tensioning weight (G), the heat conductor (2) being attached to the first end (E1) of said tilt arm, and the second end thereof substantially being mounted pivotably about a horizontal axis (H).

Description

technical field [0001] The invention relates to a device as defined in the preamble of claim 1 and to a method using the device. Background technique [0002] Such a device is known from JP 01072992A. The heating conductor is arranged horizontally above the substrate to be coated. In order to generate a suitable stretching force, the heating conductor is guided by a reorientation unit and provided with a weight at one end thereof. The devices known from the prior art have the disadvantage that the heating conductor is already damaged after one or two coating processes and can therefore no longer be used. In practice, the heating conductor needs to be replaced after each coating process. This requires a lot of time and expense. [0003] Although it is conceivable to use relatively thick heating conductors with a diameter of about 2 mm in order to eliminate the above-mentioned disadvantages, the use of such relatively thick heating conductors also has disadvantages. Compa...

Claims

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Application Information

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IPC IPC(8): H01L21/00C23C16/27
CPCH01L21/67115H01L21/67098C23C16/24C23C16/278C23C16/271C23C16/272
Inventor M.鲁弗S.罗西瓦尔C.巴雷斯W.雷克特O.莱莫M.珀尔
Owner DIACCON
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