Unlock instant, AI-driven research and patent intelligence for your innovation.

Harmonic differential drive device and single crystal furnace using same

A technology of differential transmission and harmonic reducer, which is applied in the direction of single crystal growth, crystal growth, chemical instruments and methods, etc., can solve the problems of poor precision, poor accuracy, and low sensitivity of crystal rods, and reduce the phenomenon of poor precision, The effect of high reliability

Active Publication Date: 2014-04-16
宁夏盈谷实业股份有限公司
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the existing transmission devices are all realized by mechanical structures or purely electromagnetic mechanisms. These existing transmission devices are prone to poor accuracy of execution, low sensitivity, and complex structures. Poor precision caused by the ingot

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Harmonic differential drive device and single crystal furnace using same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0012] In the present invention, a harmonic differential transmission device is provided in the single crystal furnace, and the harmonic differential transmission device adopts a double motor structure to provide high and low speed power to the crucible mechanism and the seed crystal mechanism in the single crystal furnace, so that the crucible mechanism, The crucible shaft and seed crystal rope in the seed crystal mechanism realize high-speed and low-speed ascending and descending operations.

[0013] Such as figure 1 The schematic diagram of the structure of the harmonic differential transmission 200 shown, the harmonic differential transmission 200 includes a transmission shaft 201, an end cover 202, a left housing 203, a small spacer 204, a middle housing 205, a large gear 206, a right Housing 207, harmonic reducer 208, blocking plate 209, large spacer ring 210, connecting seat 211, small motor 212, input shaft 213, large motor 214, bearing 215, bearing 216, bearing 217, b...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a harmonic differential drive device which comprises a drive shaft, an end cover, a left shell, a small space ring, a middle shell, a large rack wheel, a right shell, a harmonic speed reducer, a separation blade, a large space ring, a connection seat, a small motor, an input shaft and a large motor. In the harmonic differential drive device, a simple double-motor structure is adopted, high-precision high-reliability high / low-speed power is provided for a crucible shaft and a seed crystal rope in a single crystal furnace, so that the crucible shaft and the seed crystal rope in a crucible mechanism and a seed mechanism realize high / low-speed rising and descending operations so as to reduce the poor precision phenomenon of a crystal bar. The invention also provides the single crystal furnace using the harmonic differential drive device.

Description

Technical field: [0001] The invention relates to the technical field of monocrystalline silicon production equipment, in particular to a harmonic differential transmission device and a single crystal furnace using the harmonic differential transmission device. Background technique: [0002] Single crystal furnace is the necessary equipment for the process of converting polysilicon into single crystal silicon, and single crystal silicon is the basic raw material for photovoltaic power generation and semiconductor industry. As the key supporting material of the modern information society, single crystal silicon is one of the most important single crystal materials in the world. It is not only the main functional material for the development of computers and integrated circuits, but also the main functional material for photovoltaic power generation and utilization of solar energy. [0003] The existing single crystal furnaces will use the transmission device. During the silico...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/30
Inventor 吴学军周凯平
Owner 宁夏盈谷实业股份有限公司