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Dual Mode Mass Flow Inspection and Mass Flow Delivery System and Method

A mode and fluid quality technology, applied in the direction of measuring flow/mass flow, volume measurement, measuring capacity, etc., can solve problems such as laborious and expensive

Active Publication Date: 2011-12-28
MKS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for consumers, the cost of having both MFV and MDD is relatively expensive and laborious

Method used

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  • Dual Mode Mass Flow Inspection and Mass Flow Delivery System and Method
  • Dual Mode Mass Flow Inspection and Mass Flow Delivery System and Method
  • Dual Mode Mass Flow Inspection and Mass Flow Delivery System and Method

Examples

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Embodiment Construction

[0015] In this disclosure, a system and method are disclosed that allow a single system to perform mass flow inspection and mass flow delivery, saving cost to the customer and space to the manufacturer.

[0016] Illustrative embodiments are now discussed. Other embodiments may additionally or alternatively be used.

[0017] figure 1 is a block diagram of the mass flow tester 100 . MFV 100 includes an enclosed volume or cavity 130 (having a known volume V c ) configured to receive a fluid flow from a device under test (DUT) 110. The DUT 110 shown in the described embodiment is an MFC delivering the desired fluid flow rate. MFCs are typically self-contained devices that include mass flow sensors, control valves, and control and signal processing electronics, and can be used to repeatedly deliver desired fluid flow rates. Examples of DUT 110 may include, but are not limited to, mass flow controllers (MFCs) and mass flow ratio controllers (FRCs).

[0018] Inlet valve 120 swi...

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PUM

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Abstract

A system performs mass flow delivery of a fluid, and also performs mass flow verification of the fluid. The system includes an inlet valve that controls flow of the fluid into a chamber, an outlet valve that controls flow of the fluid out of the chamber, a pressure transducer that measures the pressure of the fluid within the chamber, a temperature sensor that measures the temperature of the fluid within the chamber, and a controller. The controller is configured to control opening and closing of the inlet and outlet valves, using the measurements of the pressure and the temperature change within the chamber, so as to verify, when in a first mode, a measurement of the flow rate of the fluid by a device, and so as to deliver, when in a second mode, a desired amount of the fluid from the chamber into a processing facility.

Description

Background technique [0001] Mass flow verifiers (MFV) can be used to verify the accuracy of high precision fluid delivery systems, such as mass flow controllers (MFC) and mass flow ratio controllers (FRC). Typically, a mass flow tester may include a chamber, a pressure transducer, a temperature sensor, and two isolation valves, one upstream and one downstream. The valve can be closed during idle periods and opened when initializing operation, allowing fluid to flow from a device under test (DUT), such as an MFC or FRC, through the flow tester. Once the fluid flow has stabilized, the downstream valve can be closed and, as a result, the pressure in the chamber can rise, and the rise in pressure as well as the temperature of the gas can be measured. These measurements can be used to calculate the flow rate and thus verify the performance of the DUT. [0002] A mass flow delivery device, such as a molar delivery device (MDD), can be used to deliver the precise amount of gas requ...

Claims

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Application Information

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IPC IPC(8): G01F1/00G01F11/00G01F23/14
CPCG01F25/0053G05D7/0647G01F25/15G01F1/00G01F11/00G01F23/14G01F25/00
Inventor 丁军华K·扎尔卡
Owner MKS INSTR INC
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