Control valve driving mechanism

Abstract

The invention discloses a control valve driving mechanism. Due to the adoption of the control valve drive mechanism, the frictional resistance between a rod member and a piston is decreased along with the shacking of the rod member. Therefore, the long-term operation is smoothly ensured. A leveling valve V comprises a housing (30), a valve column (32) arranged inside the housing (30) and a piston (31) in linkage with the valve column (32). By means of the movement of the valve column (32), the leveling valve V is switched between an air supply position and an air drainage position, wherein the gas supply port (30b) and the gas outlet (30a) of the leveling valve V are communicated with each other. The upper end face of the piston (31) is equipped with a concave part (31a). The leveling valve V driving mechanism is provided with a rod member (40) and a working pin (44). The base end of the lever member (40) is supported on the housing (30) in a freely rotating manner so as to bear the load of a machine and a platform (1) and move along the moving direction of the piston (31). A working pin (44) can freely rotate around the rotating shaft parallel to the rod member (40) and is supported on the end part (40) of the rod member (40). The top end of the working pin is accommodated inside a recess part (31a) and is supported by the recess part.

Description

technical field [0001] The present invention relates to a driving mechanism of a control valve, the control valve is connected with a gas spring bearing the load of the supported body, and the control valve is formed with an air supply and exhaust port for supplying air from An air supply port for the gas of the pressure source and an exhaust port for exhausting the gas discharged from the gas spring. Background technique [0002] Hitherto, a vibration-damping table is known in which precision instruments not to be affected by vibration, such as optical instruments, are placed on a table and elastically supported by a plurality of air springs. Adjustment (level adjustment) to keep the platform level and maintain a certain height is achieved by supplying pressurized air to and exhausting pressurized air from each air spring. That is, as an example, as disclosed in Patent Documents 1 and 2, each air spring is provided with a mechanical leveling valve that switches air supply ...

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Problems solved by technology

[0009] However, if the workload of the piston increases as described above, it will be like, for example, in Patent Document 1 Figure 2 to Figure 4 As shown, the rotation angle of the rod member 24 increases, and the actuation pin 25 slides largely like the upper end surface of the piston 19, so the problem of increased frictional resistance cannot be avoided.

[0010] The upper end surface of the piston 19 is worn due to the sliding of the above-mentioned working pin 25. If the powder produced by the wear is sandwiched between the working pin 25 and the piston 19, the frictional resistance will suddenly increase, which will hinder the smooth operation of the piston 19.

If it is used for a long time and causes the degree of wear to deepen, the lower end of the working pin 25 will be hindered by the upper end surface of the piston 19, which may cause poor work

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