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Electronic speckle-interference digital-compensating method and system thereof

A technology of electronic speckle interference and digital compensation, which is applied in the direction of instruments, measuring devices, optical devices, etc., can solve problems such as practical operation difficulties, and achieve the effect of strong adaptability and high measurement accuracy

Inactive Publication Date: 2012-02-15
SHANDONG UNIV
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Problems solved by technology

These methods are completely feasible in theory, but there are certain difficulties in practical operation.

Method used

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  • Electronic speckle-interference digital-compensating method and system thereof
  • Electronic speckle-interference digital-compensating method and system thereof
  • Electronic speckle-interference digital-compensating method and system thereof

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Embodiment Construction

[0038] The present invention will be further described below in conjunction with the accompanying drawings and implementation examples.

[0039] Such as figure 1 As shown, an electronic speckle interference digital compensation method includes the following practical steps:

[0040] 1) Fix the object to be measured on the loading device, and the test sample is loaded by the loading device, the phase shifter 5 is connected with the plane mirror 4, and the phase shifter 5 is changed by changing the optical path difference between the reference light and the object light to realize the phase shifter 5. shift. Before the sample is loaded, collect 4 4-step phase shift speckle images;

[0041] 2) Apply a certain amount of load to the sample to be tested, and then collect four 4-step phase-shifted speckle images in a similar way to step 1;

[0042] 3) Use the two-dimensional digital speckle correlation method (Jin Guanchang, Computer Aided Optical Measurement, Tsinghua University ...

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Abstract

The invention relates to an electronic speckle-interference digital-compensating method with simple operation and higher precision and a system thereof. The method comprises the following steps of: 1) fixing a measured object onto a loading device, acquiring four four-step phase-shifting speckle images before loading, and moving a plane mirror through a phase shifter to change the optical-path difference of reference light and object light to realize phase shifting; 2) after loading the measured object, reacquiring four four-step phase-shifting speckle images by a method which is similar to the step 1); 3) calculating the corresponding in-plane two-dimensional displacement of a first phase-shifting speckle image before and after deformation by a two-dimensional digital-speckle related method; 4) carrying out reverse displacement for mismatched speckle-field images before and after deformation by a digital operation method to realize the realignment of speckle fields before and after deformation; and 5) calculating the phase difference corresponding to the deformation before and after loading by a direct phase-difference solving method.

Description

technical field [0001] The invention relates to a method and system for optical displacement measurement, in particular to an electronic speckle interference digital compensation method and system thereof, belonging to the field of optical measurement experiments. Background technique [0002] Electronic speckle interferometry (ESPI) has become a relatively mature displacement or deformation measurement method, and is generally used for the measurement of small displacement or deformation fields. However, if the position of the speckle pattern does not match due to large displacement or deformation before and after the object is loaded, causing speckle decorrelation, the interference fringe cannot be obtained, and the electronic speckle interferometry method will fail at this time. Aiming at this problem, the literature (Chen Fang, Y.Y.Hung, C.T.Griffen, A new method for rigid body displacement compensation in digital shear speckle interferometry. [J], Acta Optics Sinica, 19...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B11/16
Inventor 周灿林李方义徐建强李勇黄祥岭
Owner SHANDONG UNIV
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