The invention provides an MEMS
galvanometer for inhibiting
laser speckles in a
laser display
system and a manufacturing method of the MEMS
galvanometer. An SOI (
Silicon-On-Insulator) is used as a
processing object of the MEMS
galvanometer; the MEMS galvanometer is manufactured by micro-
processing technologies such as photoetching,
etching and
coating and mainly comprises a reflective mirror, a
resonance suspension girder, driving comb teeth, detecting comb teeth and the like. Tiny waving features which are distributed randomly are designed on the surface of the reflective mirror, and a function of inhibiting the speckles is fulfilled by interfering
laser phase while laser reflection is realized. The driving comb teeth, the detecting comb teeth and the
resonance beam structure which are matched with the reflective mirror are designed on the reflective mirror, by electrostatic drive of the comb teeth, in-plane vibration of the reflective mirror can be realized, the
contrast ratio of the speckles is reduced due to
time average by stacking of speckle images in human visual
retention time, and the speckle inhibiting effect of the device is improved. The laser speckle inhibiting device in an MEMS galvanometer mode has the characteristics of high reliability, low
energy consumption, obvious speckle inhibiting effect, simplicity in
processing, easiness in large-scale production and the like.