Two-way flow type check valve and ultra-pure water system

Abstract

The invention provides a two-way flow type check valve and an ultra-pure water system. The ultra-pure water system comprises at least one pump, at least one water storage tank, at least one pipeline and at least one two-way flow type check valve, wherein the pump is used for providing power for flow of ultra-pure water, the water storage tank is used for storing the ultra-pure water, and the pump is respectively connected with the water storage tank through the pipeline. The two-way flow type check valve comprises a body and at least one valve, the body is pivoted in the pipeline and is provided with at least one support part, the valve is provided with a first tail end, a second tail end and at least one backflow hole, wherein the backflow hole is arranged between the first tail end and the second tail end, the first tail end of the valve is pivoted on the body, the second tail end is suitable for propping against the support part, and ultra-pure water flowing in a first direction and ultra-pure water flowing in a second direction can be formed in the pipeline through the backflow hole.

Description

technical field [0001] The invention relates to a bidirectional flow check valve, in particular to a backflow bidirectional flow check valve and an ultrapure water system using the bidirectional flow check valve. Background technique [0002] With the vigorous development of semiconductor technology, technological products can make great strides. Under the demand of people to pursue the advantages of products such as thinness, lightness and compactness, the components of various products also tend to be miniaturized. As a result, in semiconductor products, it is necessary to increase the integration of micro components, so that minute defects and trace impurities on the surface of the wafer are likely to seriously affect the properties of the wafer. Small defects and trace impurities on the wafer surface will not only degrade the characteristics and reliability of the components, but also reduce the yield of the wafer. Therefore, in the semiconductor manufacturing process,...

AI Technical Summary

Problems solved by technology

But when one of the pumps stops running, the ultrapure water flowing in the pipeline connected with the pump no longer provides a dynamic pressure on the valve 110 of the check valve 100, and the valve 110 interferes with the support part 122, exceeding Pure water cannot flow through the check valve 100, thus forming a dead zone

Stagnant water, that is, ultrapure water in the dead water area is prone to breed bacteria and will affect the quality of ultrapure water in the ultrapure water system

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