Measuring method for rotor suspension center of magnetic suspension molecular pump

A measurement method and molecular pump technology, applied in the direction of pumps, pump control, axial flow pumps, etc., can solve problems such as the influence of magnetic bias pulling force, and achieve the effect of matching, interchangeability, and convenient use

Active Publication Date: 2012-04-25
KYKY TECH +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] What the present invention is to solve is how to overcome the influence of the magnetic bias pulling force produced by the permanent magnet motor rotor magnet so as to accurately obtain the technical problem of the rotor levitation center of the magnetic levitation molecular pump driven by the permanent magnet motor, and provide a method that is not affected by the permanent magnet motor rotor magnet Measurement method of rotor levitation center of magnetic levitation molecular pump driven by permanent magnet motor under the influence of magnetic bias tension

Method used

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  • Measuring method for rotor suspension center of magnetic suspension molecular pump
  • Measuring method for rotor suspension center of magnetic suspension molecular pump

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Embodiment Construction

[0025] like figure 1 Shown is a schematic structural diagram of a magnetic levitation molecular pump involved in an embodiment of the present invention. The magnetic levitation molecular pump includes a pump body 3, a rotor shaft system arranged in the inner cavity of the pump body 3, and all the components in the prior art. The other structures that the magnetic levitation molecular pump should have, since the present invention does not involve the above-mentioned other structures, will not be repeated here.

[0026] The rotor shafting includes a rotor, a first radial magnetic bearing 6 , a second radial magnetic bearing 9 , a first axial magnetic bearing 13 and a second axial magnetic bearing 15 . The rotor includes a rotor shaft 7 , an impeller 1 fixed to the rotor shaft 7 , and assembly components for fixing the impeller 1 , such as screws, nuts, and the like.

[0027] The axis of the rotor shaft 7 is arranged in the vertical direction, and the impeller 1 is fixedly arran...

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Abstract

The invention relates to a measuring method for the rotor suspension center of a magnetic suspension molecular pump. The method comprises the following steps of: controlling a rotor of the magnetic suspension molecular pump to rotate to a relatively high preset rotating speed by using a magnetic suspension molecular pump controller; adjusting and determining a proper rotor suspension center according to the situation whether current of each magnetic pole of a magnetic bearing is equal; and recording the acquired rotor suspension center position in a storage medium. By adopting the measuring method provided by the invention, a proper rotor suspension center can be found automatically, stable work of the magnetic suspension molecular pump is ensured, and exchange of the magnetic suspension molecular pump and the controller can be realized.

Description

technical field [0001] The invention relates to a magnetic suspension molecular pump, in particular to a method for measuring the rotor suspension center of the magnetic suspension molecular pump. Background technique [0002] Molecular pump is a kind of vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules to obtain a directional speed, so that they are compressed, driven to the exhaust port, and then pumped away by the backing pump. Magnetic levitation molecular pump is a kind of molecular pump that uses magnetic bearing (also known as active magnetic levitation bearing) as the support of the rotor of the molecular pump. Mechanical contact has the advantages of no mechanical wear, low energy consumption, high allowable speed, low noise, long life, and no need for lubricating media. At present, magnetic levitation molecular pumps are widely used in the fields of obtaining high vacuum and high cleanliness vacuum environment. . [0003] The...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D27/00F04D19/04
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH
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