Measuring method for rotor suspension center of magnetic suspension molecular pump
A measurement method and molecular pump technology, applied in the pump, pump control, axial flow pump and other directions, can solve problems such as the influence of magnetic deflection and pull force, and achieve the effect of matching and interchangeable, easy to use
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[0025] Such as figure 1 As shown, it is a structural schematic diagram of a magnetic levitation molecular pump involved in an embodiment of the present invention. The magnetic levitation molecular pump includes a pump body 3, a rotor shafting set in the inner cavity of the pump body 3, and The above-mentioned other structures that the magnetic levitation molecular pump should have, since the present invention does not involve the above-mentioned other structures, they will not be described in detail here.
[0026] The rotor shaft system includes a rotor, a first radial magnetic bearing 6 , a second radial magnetic bearing 9 , a first axial magnetic bearing 13 and a second axial magnetic bearing 15 . The rotor includes a rotor shaft 7 , an impeller 1 fixed to the rotor shaft 7 , and assembly components for fixing the impeller 1 , such as screws and nuts.
[0027] The axis of the rotor shaft 7 is arranged along the vertical direction, and the impeller 1 is fixedly arranged on t...
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