Method for obtaining radial suspension centers of rotor of magnetic molecular pump

A molecular pump and magnetic levitation technology, which is applied in the direction of pump, pump control, axial flow pump, etc., can solve the problems that affect the stable operation of the magnetic levitation molecular pump and adversely affect the stable control of the rotor.

Active Publication Date: 2012-04-25
KYKY TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0023] The technical problem to be solved by the present invention is that there is a deviation between the radial levitation center of the rotor of the magnetic levitation molecular pump and the inner circle center of the radial magnetic bearing stator in the prior art, which affects the stable operation of the magnetic levitation molecular pump and is not conducive to the subsequent stable control of the rotor. To provide a method for obtaining the radial suspension center of the magnetic levitation molecular pump rotor that can ensure the stable operation of the magnetic levitation molecular pump and facilitate the subsequent stable control of the rotor by the control system

Method used

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  • Method for obtaining radial suspension centers of rotor of magnetic molecular pump
  • Method for obtaining radial suspension centers of rotor of magnetic molecular pump
  • Method for obtaining radial suspension centers of rotor of magnetic molecular pump

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Experimental program
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Embodiment 1

[0069] This embodiment provides a method for obtaining the radial levitation center of the rotor of a magnetic levitation molecular pump, including the following steps:

[0070] ①Before the first radial magnetic bearing is loaded into the magnetic levitation molecular pump, the X positive magnetic pole pair coil and the X negative magnetic pole pair coil of the first radial magnetic bearing are connected in series to form the X direction magnetic pole pair coil group, two Set as the X-direction detection signal output end of the first radial magnetic bearing; connect the Y positive magnetic pole pair coil and the Y negative magnetic pole pair coil of the first radial magnetic bearing in series to form a Y direction magnetic pole pair coil group , the two are set as the Y-direction detection signal output end of the first radial magnetic bearing;

[0071] ②Fix the first radial magnetic bearing stator on the calibration stand, insert the rotor into the inner circle of the first ...

Embodiment 2

[0085] In this embodiment, on the basis of embodiment 1, said step 2. includes the following steps

[0086] i. Before the first radial magnetic bearing is loaded into the magnetic levitation molecular pump, measure the inner circle center of the first radial magnetic bearing stator and take the inner circle center of the first radial magnetic bearing stator as coordinates The origin establishes the first radial magnetic bearing coordinate system;

[0087] ii. Control the rotor from the origin of the coordinate system of the first radial magnetic bearing to move along the positive direction of X for a distance of length S, and measure the X-direction detection voltage output by the X-direction demodulation circuit of the first radial magnetic bearing during this process Signal V x+ ; Control the rotor to move from the origin of the first radial magnetic bearing coordinate system along the X negative direction for a distance of S, and measure the X-direction detection voltage s...

Embodiment 3

[0092] In this embodiment, on the basis of embodiment 1 or embodiment 2, said step ④ includes the following steps

[0093] a. Place the magnetic levitation molecular pump horizontally, keep the axis of the rotor parallel to the horizontal plane, manually control the rotor, make the rotor close to the inner wall of the radial protection bearing stator and rotate for one circle, and use an oscilloscope to observe the first radial magnetic bearing at the same time The X-direction detection voltage signal output by the X-direction demodulation circuit and the Y-direction detection voltage signal output by the Y-direction demodulation circuit of the first radial magnetic bearing, record the maximum value of the X-direction detection voltage signal value V' xmax+ and the minimum value V' xmin- , and the maximum value V' of the Y-direction detection voltage signal ymax+ and the minimum value V' ymax- ; Thus, when the rotor is located at the center of the inner circle of the stator...

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Abstract

The invention discloses a method for obtaining radial suspension centers of a rotor of a magnetic molecular pump. The method is characterized by establishing a radial magnetic bearing coordinate system and a radial displacement sensor coordinate system with the radial magnetic bearing stator inner circle center and the radial displacement sensor stator inner circle center as the origins; obtaining deviations between the radial magnetic bearing stator inner circle center and the radial protection bearing stator inner circle center in the X and Y directions by obtaining a radial protection bearing stator inner circle center coordinate in the radial magnetic bearing coordinate system; obtaining the radial magnetic bearing stator inner circle center in the radial displacement sensor coordinate system according to the deviations; and adjusting the first and second radial suspension centers of the rotor to be in the first and second radial magnetic bearing stator inner circle centers through the above processes. The method has the effect of ensuring stable operation of the magnetic molecular pump system.

Description

technical field [0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a method for obtaining the radial suspension center of a magnetic levitation molecular pump rotor. Background technique [0002] The magnetic levitation molecular pump is a molecular pump that uses magnetic bearings as the rotor support of the molecular pump. It uses magnetic bearings to suspend the rotor stably in the air, so that there is no mechanical contact between the rotor and the stator during high-speed operation, and it has no mechanical wear, With the advantages of low energy consumption, high allowable speed, low noise, long life, and no need for lubrication, magnetic levitation molecular pumps are currently widely used in the fields of obtaining high vacuum and high cleanliness vacuum environments. [0003] The general internal structure of the magnetic levitation molecular pump is as follows: figure 1 As shown, the rotor of the magnetic levitatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D27/00F04D19/04
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH
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