Smooth control method in speed-down process of magnetic suspension molecular pump
A technology of smooth control and molecular pump, applied in pump control, pump, axial flow pump, etc., can solve the problems of system shock, influence stability, output jump of magnetic levitation molecular pump controller, etc.
Active Publication Date: 2012-04-25
KYKY TECH +1
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Problems solved by technology
[0007] The technical problem to be solved by the present invention is that in the prior art, when the magnetic levitation molecular pump decelerates, the unbalance algorithm is directly turned off, causing the output jump of the magnetic levitation molecular pump controller, which brings a large impact to the system and affects the technical problem of stability. Therefore, a control method for ensuring the smooth deceleration of the rotor of the magnetic levitation molecular pump is proposed
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[0020] The general structure of the magnetic levitation molecular pump is as follows: figure 1 As shown, the rotor of the maglev molecular pump generally does not run the unbalance control algorithm at low speed, and starts the unbalance control algorithm when the rotor runs at high speed. In the process of the magnetic levitation molecular pump stopping and decelerating, when the rotor is reduced from high speed to medium and low speed, and the rotating speed of the rotor satisfies the closing unbalance control algorithm, the magnetic levitation molecular pump controller closes the unbalance control algorithm, and the present invention is given below The specific implementation of the smooth control method in the deceleration process of the magnetic levitation molecular pump described above includes the following steps, and the flow chart is as follows: figure 2 Shown:
[0021] (1) In the magnetic levitation molecular pump controller, an unbalanced control algorithm and a s...
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The invention relates to a smooth control method in the speed down process of a magnetic suspension molecular pump, wherein a switching rotational speed omega 0 is set for the magnetic suspension molecular pump. In the shutdown and speed-down process of the magnetic suspension molecular pump, when the rotor speed reaches omega 0+v, a rotor common-frequency vibration signal A0 sin(omega t + phi 0) is obtained by calculation through an imbalanced control algorithm, and k is set to be the scale factor for the compensation signal ..CkA0 sin(omega t + phi 0) output through the imbalanced control algorithm. When the rotational speed of the rotor is lowered from omega 0+v to omega 0, k is reduced from 1 linearity to 0, thereby ensuring smooth transition of the imbalanced control algorithm till closure in the speed down process. The method solves the technical problem in the prior art that the imbalanced algorithm is directly closed in time of speed down of the magnetic suspension molecular pump rotor, thus causing the output of a controller of the magnetic suspension molecular pump to jump, thereby bringing about great impact on a system and affecting the stability, and therefore the control method ensures smooth speed down of the magnetic suspension molecular pump rotor.
Description
technical field [0001] The invention relates to an unbalance control method of a magnetic levitation molecular pump, in particular to a stable control method of the magnetic levitation molecular pump during the speed reduction process. Background technique [0002] The magnetic levitation molecular pump is a vacuum pump that uses a high-speed rotating rotor to transmit momentum to gas molecules to obtain a directional speed, which is compressed and driven to the exhaust port, and then pumped away by the front stage. The magnetic suspension molecular pump is a new type of high-performance molecular pump that uses magnetic bearings to generate electromagnetic force to suspend the rotor in the air, so that there is no mechanical contact between the rotor and the stator, and the rotor position can be actively controlled. Because the magnetic levitation molecular pump has the advantages of no friction, no lubrication, no pollution, high speed, long life, etc., the magnetic levita...
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IPC IPC(8): F04D27/02F04D19/04
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH