Alternating electric field-based time grating angular displacement transducer
A technology of angular displacement sensor and alternating electric field, which is applied in the direction of instruments, electric devices, electromagnetic means, etc., can solve the problems of low production efficiency, high power consumption of time grating angular displacement sensor, heavy sensor quality, etc., and achieve low cost , light weight, high resolution effect
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[0024] The present invention will be further described below in conjunction with accompanying drawing.
[0025] Figure 1(a), Figure 1(b), figure 2 , image 3 , Figure 4 , Fig. 5(a) and Fig. 5(b), the time grating angular displacement sensor based on the alternating electric field according to the present invention includes two parts: the probe base 1 and the fixed plate base 2; quartz is used as the base material, through A layer of iron-nickel alloy is sprayed on the quartz surface as an electrode.
[0026] The upper surface of the fixed plate base 2 is evenly covered with two circles of fan ring electrodes with the same radial height and the same central angle, namely the fixed plate inner ring electrode 2-1 and the fixed plate outer ring electrode 2-2. The electrodes of the inner ring of the fixed disk have the same size. The outer ring radius of the inner ring electrode 2-1 of the fixed disk is 38mm, the radial height is 10mm, the central angle is 10°, and the distanc...
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