AC Hall system
A hall device, AC output technology, applied in the direction of measuring magnetic variables, measuring devices, instruments, etc., to achieve the effect of preventing output drift, convenient failure, and convenient solution
Active Publication Date: 2012-05-09
BEIJING SHUOKE ZHONGKEXIN ELECTRONICS EQUIP CO LTD
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
However, due to the rectification effect formed by the two pairs of electrodes of the Hall sheet not in complete contact with the semiconductor sheet, as well as the parasitic DC potential generated by the temperature difference caused by the different solder joints of the two Hall electrodes and the different heat capacities
It varies with time, causing the output to drift
Method used
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[0012] The present invention will be further introduced below with reference to the drawings and specific embodiments, but it is not intended to limit the patent.
[0013] An embodiment of the present invention is as figure 1 Shown in.
[0014] figure 1 A magnetic field detection system with AC output of Hall devices is shown in, which includes:
[0015] Sine wave generating circuit (1), comparator (2), isolation transformer (3), load current sampling circuit (4), Hall plate (5), linearity correction circuit (6), key switch switching circuit (7), An isolation transformer (8), a sampling amplifier circuit (9), an absolute value amplifier circuit (10), and an output amplifier circuit (11). The sine wave generating circuit (1) generates a sine wave signal with a fixed frequency and adjustable amplitude; the comparator (2) uses an industrial-grade op07 integrated operational amplifier; an isolation transformer (3) and an isolation transformer (8) Used to isolate and amplify the colle...
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The invention relates to an AC Hall system for detecting the magnetic field. The system comprises a sinusoidal wave generation circuit (1), a comparator (2), an isolating transformer (3), a load current sampling circuit (4), a Hall sample (5), a linear correction circuit (6), a keyboard switch switching circuit (7), an isolating transformer (8), a sampling amplifying circuit (9), an absolute value amplifying circuit (10) and an output amplifying circuit (11). In the system, constant AC signals are injected into two input electrodes of a Hall device, response of the Hall sample (5) to the magnetic field is output in a manner of AC, and the isolating transformer (3) and the isolating transformer (8) can effectively isolate parasitic DC potential and prevent output drift. The Hall system has the characteristics of having strong anti-interference capability and high detection precision, being convenient to debug, and the like.
Description
Technical field [0001] The invention relates to a Hall system for detecting a magnetic field, in particular to an AC Hall system in an ion implanter for manufacturing semiconductor devices. Background technique [0002] With the increasing integration of semiconductor devices, the size of wafers is getting larger, and the size of unit devices is getting smaller and smaller, which puts forward higher requirements for various semiconductor process equipment. The ion implanter is one of the key equipment of the semiconductor ion doping process line. The size of the unit device is getting smaller and smaller, and the requirements for the stability and purity of the beam during the wafer implantation and doping process are becoming more and more stringent. [0003] In order to obtain the required ion beam, a variety of steady current power supplies are used, such as a source filter magnet power supply, a mass analyzer power supply, a parallel beam lens power supply, and the large curren...
Claims
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Inventor 孙勇彭彬彭立波唐景庭伍三忠
Owner BEIJING SHUOKE ZHONGKEXIN ELECTRONICS EQUIP CO LTD