Aerostatic electric spindle and cooling device thereof

Abstract

The invention discloses an aerostatic electric spindle and a cooling device thereof. The aerostatic electric spindle comprises a shell, a sleeve, a radial bearing, a revolving shaft, a rotor and the like, wherein the inner wall of the shell is provided with at least one groove; the groove axially extends on the inner wall of the shell; the outer wall of the sleeve and the inner wall of the shell are fixed and bound; the groove forms a path for containing a coolant; the inner wall of the sleeve and the outer wall of a radial bearing are bound; the radial bearing is cylindrical; the revolving shaft is contained in the radial bearing; the radial bearing is used for forming an air film between the inner wall of the radial bearing and the revolving shaft; the revolving shaft is supported by the air film; and in addition, one end of the revolving shaft is fixedly connected with the rotor. According to the invention, the radial bearing, the revolving shaft and other components can be effectively cooled so as to avoid the problem that the precision is affected because components such as the revolving shaft and the like in the aerostatic electric spindle are subjected to thermal deformation because of lacking of the heat radiation measures to the radial bearing part.

Description

technical field [0001] The invention relates to the field of manufacturing integrated circuit packaging equipment, in particular to an aerostatic electric spindle and a cooling device for the aerostatic electric spindle. Background technique [0002] At present, the aerostatic electric spindle is a commonly used component. It has the advantages of high precision, high speed, good stability, low friction, and easy heat dissipation. It can be mainly used in cutting machines and other equipment. [0003] When the aerostatic electric spindle is working, the compressed air that has been precisely filtered will enter the channel of the aerostatic electric spindle casing through the pipeline, then flow into the throttle hole of the bearing, and then flow into the gap between the bearing and the shaft to form a A layer of pressure air film floats the rotating shaft, so that the rotating shaft can rotate stably under the action of air pressure. [0004] Generally, the cutting machin...

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Problems solved by technology

[0009] In view of the problem in the related art that due to the lack of cooling measures for the radial bearing part of the aerostatic electric spindle, the deformation of the aerostatic electric spindle due to overheating leads to a decrease in accuracy, the present invention proposes an aerostatic electric spindle and an air static electric spindle. The cooling device of the main shaft can cool the radial bearing part of the aerostatic electric main shaft and reduce the temperature of the shaft and rotor

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