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Double-sided driving system with additional torque compensation function and double-sided driving method of double-sided driving system

A bilateral drive and additional torque technology, applied in the direction of speed adjustment of multiple motors, can solve the problems of long research and development cycle, large volume of two-dimensional motors, high cost, etc., and achieve the goals of improving efficiency, small crosstalk, and reducing product size Effect

Active Publication Date: 2012-06-06
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If there is no rich practical experience, in order to achieve the desired effect, the research and development cycle will inevitably be relatively long
[0004] In the two-dimensional motor structure, although the problem of additional torque in the Rz direction can be solved by one motor, the disadvantages of this method are: on the one hand, the volume of the two-dimensional motor may be larger than that of the one-dimensional motor; on the other hand, two The cost of a two-dimensional motor may be higher than that of two one-dimensional motors; on the other hand, if the manufacturing of two-dimensional motors is not very good, the mutual crosstalk between the two directions of motion will be more serious, and the risk of two one-dimensional motor solutions is relatively small

Method used

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  • Double-sided driving system with additional torque compensation function and double-sided driving method of double-sided driving system
  • Double-sided driving system with additional torque compensation function and double-sided driving method of double-sided driving system
  • Double-sided driving system with additional torque compensation function and double-sided driving method of double-sided driving system

Examples

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Embodiment 1

[0034] see figure 1 , figure 1Shown is a schematic structural diagram of a bilateral drive system with an additional torque compensation function according to Embodiment 1 of the present invention. This bilateral drive system with an additional torque compensation function includes: a base 107, a first carrier 101, and a double-sided motor controlled by the first carrier displacement closed-loop control unit arranged between the base 107 and the first carrier 101. Two stroke motors in the first direction that drive the first carrier 101 to move along the Y direction (the stroke motors in the first direction include the stator 103 of the stroke motor in the first direction, the mover 102 and the mover 102 of the stroke motor in the first direction The first air bearing structure 104), two first stroke measuring units 305 (please refer to image 3 ) and a first stroke measurement conversion unit 306 (please refer to image 3 ). The stators 103 of the stroke motors in the two...

Embodiment 2

[0048] see Figure 5 , Figure 5 Shown is a schematic diagram of the structure of a bilateral drive system with an additional torque compensation function according to Embodiment 2 of the present invention. The difference between this embodiment and Embodiment 1 is that: the bilateral drive system also includes a second stage 201 and a travel motor for unilaterally driving the second stage 201 to move along the X direction in the second direction, the The stator 203 of the stroke motor in the second direction is rigidly coupled with the first stage 101, the mover 202 of the stroke motor in the second direction is rigidly connected with the second stage 201, and the stroke in the second direction The stator 203 of the motor is connected with the mover 202 of the stroke motor in the second direction through the third air bearing structure 204 . Since the second stage 201 is driven unilaterally, there is no problem of torque generation in itself. Therefore, it is not necessary ...

Embodiment 3

[0053] see Figure 6 and Figure 7 , Figure 6 Shown is a schematic diagram of the structure of a bilateral drive system with an additional torque compensation function according to Embodiment 3 of the present invention. Figure 7 Shown is the control principle diagram of the second carrier 201 in embodiment 3, the control principle diagram of the first carrier 101 in embodiment 3 is the same as embodiment 1, as image 3shown. The difference between this embodiment and embodiment 1 is:

[0054] The bilateral drive system also includes: a second carrier 201, which is arranged between the first carrier 101 and the second carrier 201 and is used to drive the second carrier 201 bilaterally to move along the X direction in two second directions. (the stroke motor in the second direction includes the stator 203 of the stroke motor in the second direction, the mover 202 and the third air bearing structure in the second direction), two second stroke measuring units 405 and The se...

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Abstract

The invention provides a double-sided driving system with an additional torque compensation function and a double-sided driving method of the double-sided driving system, which belong to a system and a method for eliminating an additional torque generated in a double-sided driving process. According to the system and the method, by arranging a second-direction stroke compensation motor which is used for compensating a torque of a first carrying table and a first carrying table compensation closed-ring control unit which is used for controlling the second-direction stroke compensation motor, the torque of the first carrying table, which is caused by that two first-direction stroke motors are asynchronous and two second-direction stroke motors are asynchronous, can be eliminated. Comparing with a scheme of adopting a two-dimensional motor, the crosstalk between the first-direction stroke motor and the second-direction stroke compensation motor is smaller, so that the work of each component is more reliable. Meanwhile, according to the system and the method, the repeated calculation and test processes for selecting flexible components are omitted.

Description

technical field [0001] The invention relates to a bilateral drive system and method. Background technique [0002] In a bilateral drive system, an unavoidable problem is the Rz direction torque problem. The Rz-direction torque refers to the deviation of the center of mass of the driven object due to the asynchrony of the two drive motors used for bilateral drive and the difference in output, and the influence of the Rz-direction torque of the upper or lower object of the driven object , so that there is a Rz-direction torque in the bilateral drive system. In most cases, this torque is not expected to exist. Therefore, in the application, it is necessary to eliminate the Rz torque. In the existing technology, there are generally two methods to eliminate the Rz-direction torque. One is to add a flexible piece between the mover of the bilateral drive motor and the driven object, and absorb the torque through the deformation of the flexible piece. The second is to replace t...

Claims

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Application Information

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IPC IPC(8): H02P5/46
Inventor 董俊清吴立伟
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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