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Nanoscale micro-stretching device

A micro-stretching and nano-scale technology, which is applied in the direction of applying stable tension/pressure to test the strength of materials, can solve the problems of large shape and structure, difficult installation, poor test accuracy of the test piece, etc., and achieves small shape and structure. Compact, wide range of effects

Inactive Publication Date: 2012-06-20
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a nano-scale micro-stretching device to solve the problems of the existing stretching device with large size, poor testing accuracy and difficult installation.

Method used

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  • Nanoscale micro-stretching device

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Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0009] Specific implementation mode one: combine Figure 1-Figure 3 , Image 6 and Figure 7 To illustrate this embodiment, the device of this embodiment also includes a bottom plate 1, a support plate 2, a moving stage 3, a flexible hinge 4, a piezoelectric ceramic seat 5, a top ball 6, a tapered hole screw 7, a piezoelectric ceramic 8, and a piezoelectric ceramic seat. Electric ceramic connection cap 9, L-shaped cover plate 10, pre-tightening nut 12, static stage 13, three-dimensional displacement stage 14 and two object slides 11, the support plate 2 and three-dimensional displacement stage 14 are respectively installed on the base plate 1 , a flexible hinge 4 and an L-shaped cover plate 10 are respectively housed on the supporting plate 2, the moving object stage 3 is L-shaped, and the horizontal section of the L-shaped moving object stage 3 is vertically arranged and connected with the side wall of the flexible hinge 4, The Z-direction adjusting screw of the three-dimen...

specific Embodiment approach 2

[0012] Specific implementation mode two: combination figure 1 , Figure 4 and Figure 5 To illustrate this embodiment, the flexible hinge 4 of this embodiment is composed of a first connecting beam 15, three U-shaped hinges 16, two second connecting beams 17 and two first hinge units 18-1, each U-shaped hinge 16 includes a bottom beam 16-1, two side beams 16-2 and four second hinge units 18-2, the bottom beam 16-1 connects with one end of the corresponding side beam 16-2 through a second hinge unit 18-2 The other end of each side beam 16-2 is connected to the second hinge unit 18-2 and the second hinge unit 18-2 is connected to the bottom beam 16-1 of the remaining U-shaped hinge 16, three U-shaped The hinges 16 are arranged in the shape of a Chinese character, and the two U-shaped hinges 16 on the left side are respectively connected to a second connecting beam 17, and the middle part of each second connecting beam 17 is connected to the first connecting beam 17 through a f...

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Abstract

A nanoscale micro-stretching device relates to a micro-stretching device and solves the problem that an existing stretching device is large in contour structure size, poor in test accuracy of test pieces and difficult in installation. A bottom plate is respectively provided with a supporting plate and a three-dimensional displacement table. The supporting plate is respectively provided with a flexible hinge and an L-shaped cover plate, a movable object table is in an L shape, and a horizontal section of the L-shaped movable object is vertically arranged and connected with the lateral wall of the flexible hinge. An adjustment screw in a Z direction of the three-dimensional displacement table is connected with a fixed object table, and both the movable object table and the fixed object table are provided with object sheets. A piezoelectric ceramic seat is fixedly installed on a vertical section of the L-shaped cover plate, a piezoelectric ceramic is arranged in the piezoelectric ceramic seat, and the bottom of the piezoelectric ceramic is connected with a taper-hole screw. A head ball is arranged in a taper groove formed by the taper-hole screw and the piezoelectric ceramic seat, the top of the piezoelectric ceramic is connected with a piezoelectric ceramic connection cap, a pre-tightening nut penetrates through the vertical section of the L-shaped cover plate to be arranged corresponding to the piezoelectric ceramic connection cap, and each object sheet is provided with screw holes and a plurality of grooves. The nanoscale micro-stretching device is used for stretching test of micro members.

Description

technical field [0001] The invention relates to a micro stretching device. Background technique [0002] Micromechanical electronic system (MEMS) is an integrated microsystem that integrates micro-mechanisms, micro-sensors, micro-actuators, signal processing and control circuits, interfaces, communication circuits and power supplies, and can complete information acquisition, processing, control and execution functions. Because MEMS has the advantages of mass production, small size, high integration, low cost, high reliability and good functionality, it is widely used in micro-acceleration sensors, micro-inertial and pressure sensors, micro-jet engines, and large-scale data storage systems. And micro-biochemical analysis equipment and other fields have been greatly developed. Tiny beam structures, rod structures, and micron or even nanoscale wire structures are widely used and particularly critical mechanical components in MEMS. With the continuous expansion of MEMS applica...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/16
Inventor 白清顺何彬梁迎春卢礼华
Owner HARBIN INST OF TECH