Method and device for measuring parameters of micro solid gyroscope equivalent circuit

An equivalent circuit and parameter measurement technology, which is applied in the direction of measuring devices, measuring electrical variables, measuring resistance/reactance/impedance, etc., can solve the problem of no equivalent circuit, etc., and achieve the effect of improving analyzability

Active Publication Date: 2012-06-20
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the application of micro-solid mode gyroscopes in various fields such as automobiles, electronics, bi

Method used

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  • Method and device for measuring parameters of micro solid gyroscope equivalent circuit
  • Method and device for measuring parameters of micro solid gyroscope equivalent circuit
  • Method and device for measuring parameters of micro solid gyroscope equivalent circuit

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Embodiment Construction

[0019] The embodiments of the present invention are described in detail below. Based on the premise of the technical solution of the present invention, the present embodiment provides detailed implementation and specific operation process, but the protection scope of the present invention is not limited to the following embodiments.

[0020] Such as figure 1 As shown, the micro-solid modal structure involved in this embodiment is very simple. The material of the substrate 5 is silicon, and high-quality glass or metal can also be selected. Its shape is a cuboid, and the specification of 4mm×5mm×3mm can be selected. The electrode material on both sides of the surface is PZT piezoelectric ceramics, and the piezoelectric effect of this material is used in the gyro vibration process. There are 16 electrodes on both sides of the surface, including driving electrodes, reference electrodes and sensing electrodes, of which 1, 9, 10, and 17 are driving electrodes, 4, 7, 11, and 15 ...

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Abstract

The invention discloses a method and a device for measuring parameters of a micro solid gyroscope equivalent circuit. The micro-solid modal gyro equivalent circuit is formed by two branches in parallel connection, wherein one branch includes a static capacitance circuit, and the other branch is a serial-connection circuit of a dynamic resistor, a dynamic capacitor and a dynamic inductor. The device comprises a variable-frequency oscillator, two terminal networks and a detector. The variable-frequency oscillator supplies a constant current to the measurement circuit and the detector is a voltage meter and is used for detecting voltage across two ends of each terminal network when the frequency is varied. The measurement method which utilizes the measurement device and is based on a maximal output frequency and a capacitance bridge can be used for solving each parameter of the equivalent circuit. In order to improve the analyzability the micro-solid modal gyro in a driving or a detecting equivalent circuit, the method and the device for measuring the parameters of the micro-solid modal gyro equivalent circuit are very necessary to provide.

Description

technical field [0001] The invention relates to a parameter measurement method and device of a gyroscope equivalent circuit, in particular to a parameter measurement method and a device of a micro solid mode gyroscope equivalent circuit. Background technique [0002] When developing, producing and applying piezoelectric devices, the measurement of relevant electrical parameters is extremely important. Therefore, the research on the measurement methods of these parameters is very important at home and abroad. Obtaining the accurate equivalent circuit of piezoelectric devices is the basis of parameter measurement. [0003] Equivalent circuits refer to different representations of the same circuit. When a certain part of the circuit is replaced by its equivalent circuit, the voltage and current of the unsubstituted part will not change, that is to say, the part with constant voltage and current is only a circuit other than the equivalent part, so it is called "external equiva...

Claims

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Application Information

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IPC IPC(8): G01R27/02G01R27/26G01C25/00
Inventor 吴校生郑福陈文元张卫平崔峰刘武
Owner SHANGHAI JIAO TONG UNIV
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