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Coating strip of cavity surface of semiconductor laser and preparation method thereof

A technology of lasers and semiconductors, applied in semiconductor lasers, structural details of semiconductor lasers, lasers, etc., can solve problems that affect laser loss, life and stability, and are prone to "shadows" to improve stability and service life. The effect of the "shadow" effect

Inactive Publication Date: 2012-07-04
苏州纳睿光电有限公司
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  • Abstract
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Problems solved by technology

However, in the present invention, a plurality of semiconductor laser bars are arranged in a line for coating. When the cavity surface of the semiconductor laser bar is uneven and there are fluctuations, if the cavity surface below the ridge shape of the laser bar sinks, the cavity surface is coated here. Inhomogeneity, that is, prone to "shadow" effect, will seriously affect the loss, life and stability of the laser

Method used

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  • Coating strip of cavity surface of semiconductor laser and preparation method thereof
  • Coating strip of cavity surface of semiconductor laser and preparation method thereof
  • Coating strip of cavity surface of semiconductor laser and preparation method thereof

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Embodiment 1

[0023] Embodiment one: see Figure 1~Figure 4 As shown, a semiconductor laser cavity surface coating strip is used to separate the two laser bars when the laser bar 2 is coated. The coating strip 3 is a strip with a convex cross section, and the coating strip 3 The width is shorter than the width of the laser bar 2.

[0024] In the first embodiment, the semiconductor laser is a GaN-based semiconductor laser, the cavity length of the coated cavity surface is 600um, and the length of the semiconductor laser bar is 9.6mm.

[0025] The preparation method of the coating spar on the cavity surface of the semiconductor laser comprises the following steps:

[0026] (1) Select Si sheet as the substrate for preparing the coating spatula;

[0027] (2) Process five grooves 4 with a depth of 40 um and a width of 150 um at intervals of 550 um on one surface of the substrate in step (1);

[0028] (3) Cleavage the substrate obtained in step (2) along the axial direction of each groove 4 in...

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Abstract

The invention discloses a coating strip of a cavity surface of a semiconductor laser and a preparation method of the coating strip. The coating strip is used for separating two laser bars when the laser bars are coated. The coating strip is a strip with a convex cross section, and the width of the coating strip is shorter than the width of the laser bars. When the cavity surfaces of the laser bars are coated, the coating strip and the laser bars are arranged at intervals, and the adjacent semiconductor laser bars can be prevented from sticking together. While a 'shadow' effect is avoided, the stability of the laser is increased, and the service life of the laser is prolonged.

Description

technical field [0001] The invention relates to the field of cavity surface coating of semiconductor lasers, in particular to a semiconductor laser cavity surface coating strip and a preparation method thereof. Background technique [0002] Due to the advantages of small size, light weight and wide wavelength range, semiconductor lasers have been widely used in industry, military, medical and other fields. Stability and reliability are the prerequisites for using lasers. [0003] At the cavity surface of the semiconductor laser, the optical power density is high, the defect density is large, and defects such as dislocations will generate surface light absorption and non-radiative recombination, which will intensify with the increase of temperature, forming a The positive feedback process, which leads to the occurrence of optical catastrophe, is particularly prominent in high-power lasers. [0004] In order to protect the cavity surface of the laser, the cavity surface of th...

Claims

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Application Information

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IPC IPC(8): H01S5/10H01S5/028H01S5/02
Inventor 冯美鑫张书明刘建平王辉曾畅杨辉
Owner 苏州纳睿光电有限公司
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