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Multilayer thin film preparation system and method thereof

A multi-layer film and process technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve problems such as workpiece deformation, and achieve the effect of improving elasticity, improving process efficiency, and solving deformation

Inactive Publication Date: 2012-07-11
SUNTEK PRECISION CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] Another object of the present invention is to provide a multi-layer thin film preparation system and its method, using two sets of ring-type rotary units to form a thicker multi-layer coating on the surface of the workpiece, and to solve the problem of deformation of the workpiece

Method used

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  • Multilayer thin film preparation system and method thereof
  • Multilayer thin film preparation system and method thereof
  • Multilayer thin film preparation system and method thereof

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Embodiment Construction

[0017] refer to figure 2 , which shows a schematic plan configuration of the multilayer thin film manufacturing system 200 according to the first embodiment of the present invention. The multi-layer thin film preparation system 200 mainly includes a first circular rotary unit 202 , a second circular rotary unit 204 , a first rotary unit 206 and a second rotary unit 208 . The first annular rotary unit 202 has a plurality of first-type workbenches 210 (such as shown by reference numerals 210a-210e) arranged in an annular order, and these first-type workbenches 210 are used to position a workpiece 212 for the The workpiece 212 performs a number of different functions required by the first process. The second annular rotary unit 204 is adjacent to the first annular rotary unit 202, and the second annular rotary unit 204 has a plurality of second-type workbenches 211 arranged in a circular order (for example, as shown by reference numerals 211a-211e) , so as to perform a plurali...

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Abstract

The invention provides a multilayer thin film preparation system and a method thereof. The multilayer thin film preparation system comprises a first ring-shaped revolving unit, a second ring-shaped revolving unit, a first rotating unit and a second rotating unit. One or more work pieces are circularly revolved by utilizing the first ring-shaped and the second ring-shaped revolving units, and transferred and rapidly rotated by utilizing the first and the second rotating units, so as to cool the work pieces plated with films or conduct a coating process on the work pieces, improve the elasticity of a film plating step and improve the process efficiency.

Description

technical field [0001] The invention relates to a preparation system and method thereof, in particular to a multilayer film preparation system and method thereof. Background technique [0002] In the prior art, the industry generally adopts a painting process for the coating of the workpiece, mainly to paint various colors on the outer surface of the workpiece. However, in recent years, the sputtering metal process has gradually replaced the painting process, and is widely used in the coating of various electronic product casings, such as the coating of notebook computer casings and mobile phone casings. [0003] refer to figure 1 , which shows a schematic diagram of a coating film preparation system 100 in the prior art. The coating preparation system 100 includes a workpiece feeding machine 102, a coating device 104 and a workpiece discharging machine 106, the workpiece feeding machine 102, the coating device 104 and the workpiece discharging machine 106 are arranged in ...

Claims

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Application Information

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IPC IPC(8): C23C14/22C23C14/34
Inventor 郑兆希
Owner SUNTEK PRECISION CORP
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