A Realization Device and Method for Improving the Temperature Stability of a Target Space

Abstract

The invention provides an achieving device and an achieving method capable of improving temperature stability of an objective space. The achieving device comprises an inner shell, an outer shell, a static pressure cavity body and a filter, wherein the inside of the inner shell is the objective space, a first medium is filled in the objective space, the outer shell surrounds the inner shell, an annular space is formed between the outer shell and the inner shell, a second medium is filled in the annular space, the static pressure cavity body is positioned at one end of the outer shell, the filter is arranged between the outer shell and the static pressure cavity body, and the static pressure cavity body, the filter and the outer shell are communicated. The achieving device and the achieving method capable of improving temperature stability of the objective space are applied to devices of interferometers and the like which require high temperature stability and can achieve high temperature stability for a long time.

Description

technical field [0001] The invention relates to a temperature stabilizing device and method, in particular to a device and method for improving the temperature stability of a target space. Background technique [0002] The temperature stability index has a crucial influence on the optical path space of interferometric equipment and the performance of many other high-precision measurement equipment. [0003] The spatial temperature stability of the optical path of the interferometer refers to the rate of change of the temperature of the air (or other gases) with respect to time within a specific space that the optical path of the interferometer passes through. For example, a Fizeau interferometer used to measure the surface shape of optical lenses. The principle of the Fizeau interferometer is equal-thickness interference, which is a precision instrument used to detect the surface shape of optical components, the wavefront aberration of optical lenses, and the uniformity of ...

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Problems solved by technology

The main reason is that it is extremely difficult to control the fluctuation of the ambient temperature where the general interferometer device is placed, and the fluctuation of the general engineering ambient temperature will exceed 0.02°C

According to the method described above, the two conductors on both sides of the controlled space need to be stabilized in a very stable state of temperature, and the controlled space also has no heat transfer fluctuations, which is difficult to achieve in engineering, and in the above documents There is no mention of the necessity of thermal insulation of the controlled space and devices, let alone the methods and devices of thermal insulation, so the small temperature difference designed according to the above method is not feasible in engineering

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